JPS61220325A - Ｘ線リゾグラフイの露光装置 - Google Patents

Ｘ線リゾグラフイの露光装置

Info

Publication number
JPS61220325A
JPS61220325A JP60059655A JP5965585A JPS61220325A JP S61220325 A JPS61220325 A JP S61220325A JP 60059655 A JP60059655 A JP 60059655A JP 5965585 A JP5965585 A JP 5965585A JP S61220325 A JPS61220325 A JP S61220325A
Authority
JP
Japan
Prior art keywords
ray
target
soft
mask
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60059655A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130293B2 (OSRAM
Inventor
Tomoya Arai
智也 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Corp
Original Assignee
Rigaku Industrial Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Industrial Corp filed Critical Rigaku Industrial Corp
Priority to JP60059655A priority Critical patent/JPS61220325A/ja
Publication of JPS61220325A publication Critical patent/JPS61220325A/ja
Publication of JPH0130293B2 publication Critical patent/JPH0130293B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H10P95/00—

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60059655A 1985-03-26 1985-03-26 Ｘ線リゾグラフイの露光装置 Granted JPS61220325A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60059655A JPS61220325A (ja) 1985-03-26 1985-03-26 Ｘ線リゾグラフイの露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60059655A JPS61220325A (ja) 1985-03-26 1985-03-26 Ｘ線リゾグラフイの露光装置

Publications (2)

Publication Number Publication Date
JPS61220325A true JPS61220325A (ja) 1986-09-30
JPH0130293B2 JPH0130293B2 (OSRAM) 1989-06-19

Family

ID=13119434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60059655A Granted JPS61220325A (ja) 1985-03-26 1985-03-26 Ｘ線リゾグラフイの露光装置

Country Status (1)

Country Link
JP (1) JPS61220325A (OSRAM)

Also Published As

Publication number Publication date
JPH0130293B2 (OSRAM) 1989-06-19

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