JPS61209864A - 研磨装置 - Google Patents

研磨装置

Info

Publication number
JPS61209864A
JPS61209864A JP4824685A JP4824685A JPS61209864A JP S61209864 A JPS61209864 A JP S61209864A JP 4824685 A JP4824685 A JP 4824685A JP 4824685 A JP4824685 A JP 4824685A JP S61209864 A JPS61209864 A JP S61209864A
Authority
JP
Japan
Prior art keywords
polishing
polished
sound
sounds
polished body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4824685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525630B2 (enrdf_load_stackoverflow
Inventor
Takashi Nishiguchi
西口　隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4824685A priority Critical patent/JPS61209864A/ja
Publication of JPS61209864A publication Critical patent/JPS61209864A/ja
Publication of JPH0525630B2 publication Critical patent/JPH0525630B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP4824685A 1985-03-13 1985-03-13 研磨装置 Granted JPS61209864A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4824685A JPS61209864A (ja) 1985-03-13 1985-03-13 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4824685A JPS61209864A (ja) 1985-03-13 1985-03-13 研磨装置

Publications (2)

Publication Number Publication Date
JPS61209864A true JPS61209864A (ja) 1986-09-18
JPH0525630B2 JPH0525630B2 (enrdf_load_stackoverflow) 1993-04-13

Family

ID=12798080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4824685A Granted JPS61209864A (ja) 1985-03-13 1985-03-13 研磨装置

Country Status (1)

Country Link
JP (1) JPS61209864A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0525630B2 (enrdf_load_stackoverflow) 1993-04-13

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