JPS61201690A - 化合物半導体単結晶の育成方法および育成装置 - Google Patents
化合物半導体単結晶の育成方法および育成装置Info
- Publication number
- JPS61201690A JPS61201690A JP4105985A JP4105985A JPS61201690A JP S61201690 A JPS61201690 A JP S61201690A JP 4105985 A JP4105985 A JP 4105985A JP 4105985 A JP4105985 A JP 4105985A JP S61201690 A JPS61201690 A JP S61201690A
- Authority
- JP
- Japan
- Prior art keywords
- crystal growth
- melt
- single crystal
- crystal
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4105985A JPS61201690A (ja) | 1985-03-04 | 1985-03-04 | 化合物半導体単結晶の育成方法および育成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4105985A JPS61201690A (ja) | 1985-03-04 | 1985-03-04 | 化合物半導体単結晶の育成方法および育成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61201690A true JPS61201690A (ja) | 1986-09-06 |
| JPH0242800B2 JPH0242800B2 (cg-RX-API-DMAC7.html) | 1990-09-26 |
Family
ID=12597843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4105985A Granted JPS61201690A (ja) | 1985-03-04 | 1985-03-04 | 化合物半導体単結晶の育成方法および育成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201690A (cg-RX-API-DMAC7.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102864496A (zh) * | 2012-09-20 | 2013-01-09 | 上海大学 | 移动加热器法生长碲锌镉晶体的装置 |
| WO2015129091A1 (ja) * | 2014-02-27 | 2015-09-03 | 日立アロカメディカル株式会社 | 結晶育成用るつぼおよびそれを備えた結晶育成装置ならびに結晶育成方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5731555A (en) * | 1980-08-02 | 1982-02-20 | Showa Aluminium Co Ltd | Manufacture of aluminum foil vessel |
| JPS57179093A (en) * | 1981-04-27 | 1982-11-04 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for manufacturing single crystal of compound semiconductor |
-
1985
- 1985-03-04 JP JP4105985A patent/JPS61201690A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5731555A (en) * | 1980-08-02 | 1982-02-20 | Showa Aluminium Co Ltd | Manufacture of aluminum foil vessel |
| JPS57179093A (en) * | 1981-04-27 | 1982-11-04 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for manufacturing single crystal of compound semiconductor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102864496A (zh) * | 2012-09-20 | 2013-01-09 | 上海大学 | 移动加热器法生长碲锌镉晶体的装置 |
| WO2015129091A1 (ja) * | 2014-02-27 | 2015-09-03 | 日立アロカメディカル株式会社 | 結晶育成用るつぼおよびそれを備えた結晶育成装置ならびに結晶育成方法 |
| JP2015160771A (ja) * | 2014-02-27 | 2015-09-07 | 日立アロカメディカル株式会社 | 結晶育成用るつぼおよびそれを備えた結晶育成装置ならびに結晶育成方法 |
| CN106062258A (zh) * | 2014-02-27 | 2016-10-26 | 株式会社日立制作所 | 晶体培养用坩埚、具备该晶体培养用坩埚的晶体培养装置以及晶体培养方法 |
| EP3112503A4 (en) * | 2014-02-27 | 2017-08-23 | Hitachi, Ltd. | Crucible for crystal growth, crystal growth apparatus provided therewith, and method for growing crystals |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0242800B2 (cg-RX-API-DMAC7.html) | 1990-09-26 |
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