JPS61199661U - - Google Patents
Info
- Publication number
- JPS61199661U JPS61199661U JP8336685U JP8336685U JPS61199661U JP S61199661 U JPS61199661 U JP S61199661U JP 8336685 U JP8336685 U JP 8336685U JP 8336685 U JP8336685 U JP 8336685U JP S61199661 U JPS61199661 U JP S61199661U
- Authority
- JP
- Japan
- Prior art keywords
- screen
- defect inspection
- light
- inspected
- surface defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 238000002834 transmittance Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8336685U JPH0348525Y2 (xx) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8336685U JPH0348525Y2 (xx) | 1985-06-04 | 1985-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61199661U true JPS61199661U (xx) | 1986-12-13 |
| JPH0348525Y2 JPH0348525Y2 (xx) | 1991-10-16 |
Family
ID=30631932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8336685U Expired JPH0348525Y2 (xx) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0348525Y2 (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796829A (zh) * | 2016-08-31 | 2018-03-13 | 株式会社理光 | 检查装置 |
-
1985
- 1985-06-04 JP JP8336685U patent/JPH0348525Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796829A (zh) * | 2016-08-31 | 2018-03-13 | 株式会社理光 | 检查装置 |
| CN107796829B (zh) * | 2016-08-31 | 2020-11-06 | 株式会社理光 | 检查装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0348525Y2 (xx) | 1991-10-16 |
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