JPS61199661U - - Google Patents
Info
- Publication number
- JPS61199661U JPS61199661U JP8336685U JP8336685U JPS61199661U JP S61199661 U JPS61199661 U JP S61199661U JP 8336685 U JP8336685 U JP 8336685U JP 8336685 U JP8336685 U JP 8336685U JP S61199661 U JPS61199661 U JP S61199661U
- Authority
- JP
- Japan
- Prior art keywords
- screen
- defect inspection
- light
- inspected
- surface defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 238000002834 transmittance Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図イはこの考案の一実施例におけるスクリ
ーンのみを示す平面図、同図ロはイのＡ―Ａ線に
沿う断面及び作用説明図、同図ハはイのＢ―Ｂ線
に沿う断面図、第２図イ，ロ，ハは同じくそのス
クリーン直前の光量分布、スクリーン透過後の光
量分布、及びラインセンサ出力をそれぞれ示す線
図である。第３図イはこの考案の他の実施例にお
けるスクリーンのみを示す平面図、同図ロはイの
Ｃ―Ｃ線に沿う断面及び作用説明図、同図ハはイ
のＤ―Ｄ線に沿う断面図、第４図イ，ロは同じく
そのスクリーンの中央部と周辺部における投影さ
れたレーザスリツト光の拡散状態をそれぞれ示す
光路図、第５図イ，ロ，ハは同じくそのスクリー
ン直前の光量分布、スクリーン透過後の光量分布
、及びラインセンサ出力をそれぞれ示す線図であ
る。第６図は従来のレーザ光を用いた表面欠陥検
査装置の原理図である。第７図及び第８図はこの
考案を適用する表面欠陥検査装置の例を示す正面
図及び右側面図、第９図乃至第１２図は同じくそ
の作用説明に供する説明図である。
６……基部、７……レーザ発生器（光源）、８
……検出器、９……カメラ部、９ａ……集光レン
ズ、９ｂ……ラインセンサ、１０……従来のスク
リーン、１１……検出筒、１２……被検査物の表
面、２０，３０……この考案におけるスクリーン
（拡散板）、２０ａ，３０ａ……入射面、２０ｂ
，３０ｂ……射出面。
Figure 1A is a plan view showing only the screen in one embodiment of this invention, Figure 1B is a cross-sectional diagram along line A-A in Figure 1 and an explanatory view of its operation, Figure C is a cross-section along line B-B in Figure 1. 2A, 2B, and 2C are diagrams showing the light amount distribution just before the screen, the light amount distribution after passing through the screen, and the line sensor output, respectively. Fig. 3A is a plan view showing only the screen in another embodiment of this invention, Fig. 3B is a cross-sectional view and action explanatory diagram taken along line C-C in Fig. 3, and Fig. 3C is a plan view taken along line D-D in Fig. 3. Cross-sectional views, Figures 4A and 4B are optical path diagrams showing the diffusion state of the projected laser slit light in the center and periphery of the screen, respectively, and Figures 5A, 2B, and 2C are the light intensity distributions just in front of the screen. , a diagram showing a light amount distribution after passing through a screen, and a line sensor output, respectively. FIG. 6 is a principle diagram of a conventional surface defect inspection apparatus using laser light. 7 and 8 are a front view and a right side view showing an example of a surface defect inspection apparatus to which this invention is applied, and FIGS. 9 to 12 are explanatory views for explaining the operation thereof. 6...Base, 7...Laser generator (light source), 8
. . . Detector, 9 . . . Camera unit, 9a . ...Screen (diffusion plate) in this invention, 20a, 30a...Incidence surface, 20b
, 30b... Injection surface.
Claims (1)
てその反射光をスクリーンに投影し、該スクリー
ン上の像を集光レンズを介してラインセンサによ
り検出することによつて前記被検査物の表面欠陥
を検査する表面欠陥検査装置において、 前記スクリーンを光の透過率が中央部で最も小
さく周辺部へ行く程大きくなる拡散板によつて構
成したことを特徴とする表面欠陥検査装置。[Claim for Utility Model Registration] Projecting slit light from a light source onto the surface of an object to be inspected, projecting the reflected light onto a screen, and detecting the image on the screen with a line sensor via a condensing lens. Accordingly, in the surface defect inspection device for inspecting surface defects of the object to be inspected, the screen is configured with a diffuser plate whose light transmittance is lowest in the center and increases toward the periphery. Surface defect inspection equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8336685U JPH0348525Y2 (en) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8336685U JPH0348525Y2 (en) | 1985-06-04 | 1985-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61199661U true JPS61199661U (en) | 1986-12-13 |
| JPH0348525Y2 JPH0348525Y2 (en) | 1991-10-16 |
Family
ID=30631932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8336685U Expired JPH0348525Y2 (en) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0348525Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796829A (en) * | 2016-08-31 | 2018-03-13 | 株式会社理光 | Check device |
-
1985
- 1985-06-04 JP JP8336685U patent/JPH0348525Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796829A (en) * | 2016-08-31 | 2018-03-13 | 株式会社理光 | Check device |
| CN107796829B (en) * | 2016-08-31 | 2020-11-06 | 株式会社理光 | Inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0348525Y2 (en) | 1991-10-16 |
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