JPS63159757U

JPS63159757U -

Info

Publication number: JPS63159757U
Application number: JP5273387U
Authority: JP
Priority date: 1987-04-09
Filing date: 1987-04-09
Publication date: 1988-10-19

Description

[Brief explanation of the drawing]

第１図は本考案の検査装置の一実施例を示す正
面図、第２図は第１図の監視装置で用いる受光器
の一実施例を示す断面図、第３図は第２図の３−
３線に沿つて得た断面図、第４図は信号処理回路
の一実施例を示すブロツク線図、第５図は電気信
号の波形を示す図である。１０：検査装置、１２：被検査体、１４：支持
機構、２４：被検査体の駆動機構、３０：投光器
、３８：受光器、４２：レンズ、４６：マスク、
４８：受光素子、６０：処理回路。 FIG. 1 is a front view showing an embodiment of the inspection device of the present invention, FIG. 2 is a sectional view showing an embodiment of the light receiver used in the monitoring device of FIG. 1, and FIG. −
4 is a block diagram showing one embodiment of the signal processing circuit, and FIG. 5 is a diagram showing the waveform of an electric signal. 10: inspection device, 12: object to be inspected, 14: support mechanism, 24: drive mechanism for the object to be inspected, 30: light projector, 38: light receiver, 42: lens, 46: mask,
48: Light receiving element, 60: Processing circuit.

Claims

[Claims for Utility Model Registration] (1) An apparatus for inspecting the presence or absence of defects on the surface of a long object to be inspected while moving the object in the longitudinal direction, the apparatus comprising: light projecting means for irradiating light onto the entire surface of a region within a predetermined length range; light receiving means for receiving diffusely reflected light from the region of the object to be inspected and outputting an electrical signal corresponding to the amount of received light; processing means for processing the output signal of the light receiving means to generate an electric signal for identifying the presence or absence of the defect, the light projecting means comprising a plurality of light projectors,
A defect inspection device for a long member, wherein the light receiving means includes a plurality of light receivers. (2) The elongated member according to claim (1) of the utility model registration, wherein the projector is arranged so as to generate a light beam directed in a plane including the moving direction of the object to be inspected. Defect inspection equipment. (3) The light receiver includes a lens that allows light from the part of the object to be inspected to pass through, a photoelectric conversion member that receives the light that has passed through the lens and generates an electrical signal according to the amount of received light, and the photoelectric conversion member that receives the light that has passed through the lens and generates an electrical signal according to the amount of light received a mask disposed on a side of the lens of the conversion member, the mask having a slit that allows part of the light that has passed through the lens to reach the photoelectric member in order to limit the field of view of the photoelectric conversion member; Defect inspection of a long member according to claim (1) of the registered utility model, wherein the slit is arranged so as to extend in a direction transverse to the image of the object to be inspected projected on the photoelectric conversion member. Device.