JPS6228155U - - Google Patents
Info
- Publication number
- JPS6228155U JPS6228155U JP11818585U JP11818585U JPS6228155U JP S6228155 U JPS6228155 U JP S6228155U JP 11818585 U JP11818585 U JP 11818585U JP 11818585 U JP11818585 U JP 11818585U JP S6228155 U JPS6228155 U JP S6228155U
- Authority
- JP
- Japan
- Prior art keywords
- screen
- inspected
- projecting
- onto
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図Ａ，Ｂはこの考案の一実施例を示す斜視
図及び模式的配置図、第２図及び第３図イ，ロは
同じくその作用説明に供する説明図、第４図はこ
の考案の他の実施例を示す模式的配置図、第５図
は同じくその作用説明に供する説明図、第６図は
従来のレーザ光を用いた表面欠陥検査装置の原理
図、第７図及び第８図はこの考案を適用する表面
欠陥検査装置の例を示す正面図及び右側面図、第
９図乃至第１１図イ，ロは同じくその作用説明に
供する説明図である。
６……基部、７……レーザ発生器（光源）、８
……検出器、９……カメラ部、９ａ……集光レン
ズ、９ｂ……ラインセンサ、１０……スクリーン
、１１……検出筒、１２，１２′……被検査物の
表面、１３……凸型のシリンドリカルレンズ、１
４……凹型のシリンドリカルレンズ。
Figures 1A and 1B are perspective views and schematic layout diagrams showing one embodiment of this invention, Figures 2 and 3 A and 3 are explanatory diagrams for explaining its operation, and Figure 4 is an illustration of the invention. A schematic layout diagram showing another embodiment, FIG. 5 is an explanatory diagram for explaining its operation, FIG. 6 is a principle diagram of a conventional surface defect inspection device using laser light, and FIGS. 7 and 8 9 is a front view and a right side view showing an example of a surface defect inspection apparatus to which this invention is applied, and FIGS. 9 to 11A and 11B are explanatory views for explaining the operation thereof. 6...Base, 7...Laser generator (light source), 8
. . . Detector, 9 . . . Camera unit, 9a . Convex cylindrical lens, 1
4... Concave cylindrical lens.
Claims (1)
てその反射光を拡散板によるスクリーンに投影し
、該スクリーン上の像を集光レンズを介してライ
ンセンサにより検出することによつて前記被検査
物の表面欠陥を検査する表面欠陥検査装置におい
て、 前記スクリーン上にシリンドリカルレンズを設
けたことを特徴とする表面欠陥検査装置。[Claim for Utility Model Registration] Projecting slit light from a light source onto the surface of an object to be inspected, projecting the reflected light onto a screen made of a diffuser plate, and detecting the image on the screen by a line sensor via a condensing lens. A surface defect inspection device for inspecting surface defects of the object to be inspected by: A cylindrical lens is provided on the screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11818585U JPS6228155U (en) | 1985-08-02 | 1985-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11818585U JPS6228155U (en) | 1985-08-02 | 1985-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228155U true JPS6228155U (en) | 1987-02-20 |
Family
ID=31004400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11818585U Pending JPS6228155U (en) | 1985-08-02 | 1985-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228155U (en) |
-
1985
- 1985-08-02 JP JP11818585U patent/JPS6228155U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6228155U (en) | ||
| JPS61199661U (en) | ||
| JPH0327343U (en) | ||
| JPS63175854U (en) | ||
| JPH0164057U (en) | ||
| JPH1144650A (en) | Visual inspection apparatus for cylindrical work | |
| JPS60228908A (en) | Inspection of surface defect | |
| JPH0310250U (en) | ||
| JPS62117559U (en) | ||
| JPH01179245U (en) | ||
| JPS5964559U (en) | Surface defect inspection equipment | |
| JPH0279448U (en) | ||
| JPH02109241U (en) | ||
| JPS63159757U (en) | ||
| JPS62150612U (en) | ||
| JPH01118347U (en) | ||
| JPH0275583U (en) | ||
| JPH0352748U (en) | ||
| JPS6344152U (en) | ||
| JPS5850414U (en) | Projection device for defect detection | |
| JPH01140817U (en) | ||
| JPS61203006U (en) | ||
| JPH043497B2 (en) | ||
| JPS6021957U (en) | Surface defect inspection equipment | |
| JPS636439U (en) |