JPS6021957U - Surface defect inspection equipment - Google Patents
Surface defect inspection equipmentInfo
- Publication number
- JPS6021957U JPS6021957U JP11281183U JP11281183U JPS6021957U JP S6021957 U JPS6021957 U JP S6021957U JP 11281183 U JP11281183 U JP 11281183U JP 11281183 U JP11281183 U JP 11281183U JP S6021957 U JPS6021957 U JP S6021957U
- Authority
- JP
- Japan
- Prior art keywords
- defect inspection
- surface defect
- inspection equipment
- inspected
- diffraction image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案になる表面欠陥検査装置の一実施例の概
略構成図、第２図はそのセンサボードの要部の拡大平面
図、第３図〜第５図は夫々被検査体からの反射光の回折
像を示す図である。
１・・・レーザ光発生器、２・・・レーザ光、６・・・
被検査体、７・・・センサボード、８・・・アクチュエ
ータ、９・・・マスク、１０ （１０ａ〜１０ｄ）・・
・センサ、１１・・・判別回路、１２・・・ディスプレ
イ、１３・・・投影板、１４ａ、１４ｂ、１４ｃ・・・
正規の回折像、１５ａ、１５ｂ、１５ｃ・・・欠陥があ
る場合の回折像。Fig. 1 is a schematic configuration diagram of an embodiment of the surface defect inspection device according to the present invention, Fig. 2 is an enlarged plan view of the main part of the sensor board, and Figs. FIG. 3 is a diagram showing a diffraction image of reflected light. 1... Laser light generator, 2... Laser light, 6...
Test object, 7... Sensor board, 8... Actuator, 9... Mask, 10 (10a to 10d)...
- Sensor, 11... Discrimination circuit, 12... Display, 13... Projection plate, 14a, 14b, 14c...
Regular diffraction images, 15a, 15b, 15c...diffraction images with defects.
Claims (1)
からの反射光の回折像を結像させる結像手段と、該結像
手段において被検査体に傷がない場合の正規の回折像の
周囲に略沿って配された複数のセンサと、該センサの出
力を判別して該被検査体の傷の有無を検出する判別手段
とより構成してなる表面欠陥検査装置。An irradiation means for irradiating light onto the surface of the object to be inspected; an imaging means for forming a diffraction image of the reflected light from the object; A surface defect inspection device comprising a plurality of sensors arranged approximately along the periphery of a diffraction image, and a discriminating means for discriminating the outputs of the sensors to detect the presence or absence of flaws on the object to be inspected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11281183U JPS6021957U (en) | 1983-07-20 | 1983-07-20 | Surface defect inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11281183U JPS6021957U (en) | 1983-07-20 | 1983-07-20 | Surface defect inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6021957U true JPS6021957U (en) | 1985-02-15 |
Family
ID=30261382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11281183U Pending JPS6021957U (en) | 1983-07-20 | 1983-07-20 | Surface defect inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6021957U (en) |
-
1983
- 1983-07-20 JP JP11281183U patent/JPS6021957U/en active Pending
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