JPS60183808U

JPS60183808U - surface inspection equipment

Info

Publication number: JPS60183808U
Application number: JP5804185U
Authority: JP
Inventors: 稲荷　隆彦; 光仁亀井
Original assignee: 三菱電機株式会社
Priority date: 1985-04-16
Filing date: 1985-04-16
Publication date: 1985-12-06

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は肉眼検査法の構成を示すブロック図、第２図は
第１図における肉眼検査によって得られる検査結果を示
す図、第３図はこの考案の一実施例における表面検査装
置の構成を示すブロック図、第４図は塗装板の表面が正
常な場合に得られるスリット像とそれに対応するビデオ
信号を示す図、第５図は塗装板の表面が欠陥を有する場
合に得られるスリット像とそれに対応するビデオ信号を
示す図、第６図は信号処理装置の一実施例の構成を示す
ブロック図、第７図及び第８図は第４図及び第５図にお
けるビデオ信号を第６図におけるコンパレータによって
異一つだスライスレベルで整形した波形を示す図である
。図において、１は標準パターン、２は検査試料、３は観
察面、４，５は検査結果、６は光源、７は集光レンズ、
８は拡散板、９は塗装板、１０は標準パターン、１１は
ｉＴＶ装置、１２は信号処理装置、１３は論理演算装置
、４ａ、５ａはスリット像、４ｂ、５ｂはビデオ信号、
１２ｄ、１２ｅ、１２讐はコンパレーク、ｄ、ｅ、ｆは
スライ　　　　“′スレベル、７ｄ、７ｅ、７ｆは波形
、８ｄ、８ｅ、８ｆは波形である。尚、図中同一符号は
同−又は相当部分を示す。FIG. 1 is a block diagram showing the configuration of the visual inspection method, FIG. 2 is a diagram showing the inspection results obtained by the visual inspection in FIG. 1, and FIG. 3 is the configuration of the surface inspection device in one embodiment of this invention. 4 is a block diagram showing a slit image obtained when the surface of a painted board is normal and the corresponding video signal, and FIG. 5 is a diagram showing a slit image obtained when the surface of a painted board has defects. 6 is a block diagram showing the configuration of an embodiment of the signal processing device, and FIGS. 7 and 8 show the video signals in FIGS. 4 and 5. FIG. 7 is a diagram showing a waveform shaped at a different slice level by a comparator. In the figure, 1 is a standard pattern, 2 is a test sample, 3 is an observation surface, 4 and 5 are test results, 6 is a light source, 7 is a condenser lens,
8 is a diffusion plate, 9 is a painted plate, 10 is a standard pattern, 11 is an iTV device, 12 is a signal processing device, 13 is a logic operation device, 4a and 5a are slit images, 4b and 5b are video signals,
12d, 12e, and 12 are comparator levels, d, e, and f are slice levels, 7d, 7e, and 7f are waveforms, and 8d, 8e, and 8f are waveforms. In addition, the same symbols in the figures are the same or equivalent parts. shows.

Claims

[Scope of utility model registration request]

An irradiation system configured to irradiate the surface of the object to be inspected with a predetermined pattern, and a charging conversion system that detects light from the pattern irradiated onto the surface of the object to be inspected and generates an output signal corresponding to the light. , comprising an information processing system that detects pattern information on the surface of the object to be inspected from the output signal of the photoelectric conversion system and determines a defect on the surface of the object to be inspected by reading that the information is different from normal pattern information. , the information processing system includes a plurality of comparison units each having a different slice level set to determine the difference from the pattern information, and quantifies the sharpness of the pattern information based on the comparison difference between the outputs of each comparison unit. 1. A surface inspection device comprising: a logical operation section;