JPS59146709U - Defect inspection equipment - Google Patents
Defect inspection equipmentInfo
- Publication number
- JPS59146709U JPS59146709U JP4092583U JP4092583U JPS59146709U JP S59146709 U JPS59146709 U JP S59146709U JP 4092583 U JP4092583 U JP 4092583U JP 4092583 U JP4092583 U JP 4092583U JP S59146709 U JPS59146709 U JP S59146709U
- Authority
- JP
- Japan
- Prior art keywords
- defect inspection
- inspection equipment
- parallel
- light beam
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図から第3図までは従来の欠陥検査装置の概要と欠
点を説明するための図、第4図は本考案に係る欠陥検査
装置の主要構成部分を示す図である。
図において、1はプリント配線基板、2と21はスルー
ホール、3はレンズ、4は光検知器、5は平行光線束、
6はマスク、7は金属メッキ層、8は欠損部である。1 to 3 are diagrams for explaining the outline and drawbacks of a conventional defect inspection device, and FIG. 4 is a diagram showing the main components of the defect inspection device according to the present invention. In the figure, 1 is a printed wiring board, 2 and 21 are through holes, 3 is a lens, 4 is a photodetector, 5 is a parallel beam of light,
6 is a mask, 7 is a metal plating layer, and 8 is a defective portion.
Claims (1)
状の不透光性物体の欠損を検出する装置において、該不
透光性物体部に直接に投射される該平行光線束を遮光す
るためのマスクの形状を、その長辺が該平行光線束に平
行であり、かつまた少なくとも当該被検査不透光性物体
に隣接する不透光性物体に対する遮光可能な大きさを有
する長方形としたことを特徴とする欠陥検査装置。In a device for detecting a defect in a tubular non-transparent object provided to penetrate a light-diffusing substrate, the parallel light beam directly projected onto the non-transparent object is blocked. The shape of the mask is a rectangle whose long sides are parallel to the parallel light beam and whose size is large enough to block light from at least an opaque object adjacent to the opaque object to be inspected. A defect inspection device characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4092583U JPS59146709U (en) | 1983-03-22 | 1983-03-22 | Defect inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4092583U JPS59146709U (en) | 1983-03-22 | 1983-03-22 | Defect inspection equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59146709U true JPS59146709U (en) | 1984-10-01 |
Family
ID=30171527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4092583U Pending JPS59146709U (en) | 1983-03-22 | 1983-03-22 | Defect inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59146709U (en) |
-
1983
- 1983-03-22 JP JP4092583U patent/JPS59146709U/en active Pending
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