JPS59146709U - Defect inspection equipment - Google Patents

Defect inspection equipment

Info

Publication number
JPS59146709U
JPS59146709U JP4092583U JP4092583U JPS59146709U JP S59146709 U JPS59146709 U JP S59146709U JP 4092583 U JP4092583 U JP 4092583U JP 4092583 U JP4092583 U JP 4092583U JP S59146709 U JPS59146709 U JP S59146709U
Authority
JP
Japan
Prior art keywords
defect inspection
inspection equipment
parallel
light beam
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4092583U
Other languages
Japanese (ja)
Inventor
護俊 安藤
三田 喜久夫
柿木 義一
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP4092583U priority Critical patent/JPS59146709U/en
Publication of JPS59146709U publication Critical patent/JPS59146709U/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図から第3図までは従来の欠陥検査装置の概要と欠
点を説明するための図、第4図は本考案に係る欠陥検査
装置の主要構成部分を示す図である。 図において、1はプリント配線基板、2と21はスルー
ホール、3はレンズ、4は光検知器、5は平行光線束、
6はマスク、7は金属メッキ層、8は欠損部である。
1 to 3 are diagrams for explaining the outline and drawbacks of a conventional defect inspection device, and FIG. 4 is a diagram showing the main components of the defect inspection device according to the present invention. In the figure, 1 is a printed wiring board, 2 and 21 are through holes, 3 is a lens, 4 is a photodetector, 5 is a parallel beam of light,
6 is a mask, 7 is a metal plating layer, and 8 is a defective portion.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光拡散性の基体を貫通するようにして設けられている管
状の不透光性物体の欠損を検出する装置において、該不
透光性物体部に直接に投射される該平行光線束を遮光す
るためのマスクの形状を、その長辺が該平行光線束に平
行であり、かつまた少なくとも当該被検査不透光性物体
に隣接する不透光性物体に対する遮光可能な大きさを有
する長方形としたことを特徴とする欠陥検査装置。
In a device for detecting a defect in a tubular non-transparent object provided to penetrate a light-diffusing substrate, the parallel light beam directly projected onto the non-transparent object is blocked. The shape of the mask is a rectangle whose long sides are parallel to the parallel light beam and whose size is large enough to block light from at least an opaque object adjacent to the opaque object to be inspected. A defect inspection device characterized by:
JP4092583U 1983-03-22 1983-03-22 Defect inspection equipment Pending JPS59146709U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4092583U JPS59146709U (en) 1983-03-22 1983-03-22 Defect inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4092583U JPS59146709U (en) 1983-03-22 1983-03-22 Defect inspection equipment

Publications (1)

Publication Number Publication Date
JPS59146709U true JPS59146709U (en) 1984-10-01

Family

ID=30171527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4092583U Pending JPS59146709U (en) 1983-03-22 1983-03-22 Defect inspection equipment

Country Status (1)

Country Link
JP (1) JPS59146709U (en)

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