JPS5845533U - Illuminance distribution measuring device - Google Patents

Illuminance distribution measuring device

Info

Publication number
JPS5845533U
JPS5845533U JP1981140413U JP14041381U JPS5845533U JP S5845533 U JPS5845533 U JP S5845533U JP 1981140413 U JP1981140413 U JP 1981140413U JP 14041381 U JP14041381 U JP 14041381U JP S5845533 U JPS5845533 U JP S5845533U
Authority
JP
Japan
Prior art keywords
distribution measuring
measuring device
illuminance distribution
masking blade
illuminance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981140413U
Other languages
Japanese (ja)
Inventor
芳雅 福嶋
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP1981140413U priority Critical patent/JPS5845533U/en
Publication of JPS5845533U publication Critical patent/JPS5845533U/en
Pending legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Control Of Exposure In Printing And Copying (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は縮小投影露光装置の概略図、第２図はマスキン
グ・ブレードの概略図である。 １・・・光源、２・・・レティクル、３・・・縮小レン
ズ、４・・・ウェーハ、５・・・ウェーハ、６・・・遮
光板、７・・・照度計。FIG. 1 is a schematic diagram of a reduction projection exposure apparatus, and FIG. 2 is a schematic diagram of a masking blade. DESCRIPTION OF SYMBOLS 1... Light source, 2... Reticle, 3... Reduction lens, 4... Wafer, 5... Wafer, 6... Light shielding plate, 7... Illuminance meter.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 縮小投影露光装置又は類似装置においてレティフル面上
のパターンの大きさに合わせて光束を絞る装置（マスキ
ング・ブレード装置）を有するものにおいて、該マスキ
ング・ブレード装置に照度計を設けたことを特徴とする
照度分布測定装置。A reduction projection exposure device or similar device having a device (masking blade device) that focuses a light beam according to the size of a pattern on a retiful surface, characterized in that the masking blade device is provided with an illuminance meter. Illuminance distribution measuring device.
JP1981140413U 1981-09-24 1981-09-24 Illuminance distribution measuring device Pending JPS5845533U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981140413U JPS5845533U (en) 1981-09-24 1981-09-24 Illuminance distribution measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981140413U JPS5845533U (en) 1981-09-24 1981-09-24 Illuminance distribution measuring device

Publications (1)

Publication Number Publication Date
JPS5845533U true JPS5845533U (en) 1983-03-26

Family

ID=29933574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981140413U Pending JPS5845533U (en) 1981-09-24 1981-09-24 Illuminance distribution measuring device

Country Status (1)

Country Link
JP (1) JPS5845533U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045252A (en) * 1983-08-23 1985-03-11 Canon Inc Illuminating system of projecting and exposing device
JPS60162258A (en) * 1984-02-01 1985-08-24 Canon Inc Exposure device
JPS6323318A (en) * 1987-04-13 1988-01-30 Canon Inc Projection exposure device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045252A (en) * 1983-08-23 1985-03-11 Canon Inc Illuminating system of projecting and exposing device
JPS60162258A (en) * 1984-02-01 1985-08-24 Canon Inc Exposure device
JPS6323318A (en) * 1987-04-13 1988-01-30 Canon Inc Projection exposure device

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