JPS5871741U

JPS5871741U - exposure equipment

Info

Publication number: JPS5871741U
Application number: JP16795981U
Authority: JP
Inventors: 平賀　泰司
Original assignee: 日本電気株式会社
Priority date: 1981-11-11
Filing date: 1981-11-11
Publication date: 1983-05-16

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は本考案による露光装置の概略図、第２図は試料
及び該試料上のフォトレジストを照射源の移動方向に直
角の方向を断面図示したもの、第３図は本考案の特徴で
ある補正板の開口部の形状を示す図である。なお図に於１．−＞て、１・・・・・・照射源、４・・
・・・・シャッター、７・・・・・・フォトマスク、８
・・・・・・試料、９・・・・・・補正板、１０・・・
・・・フォトレジスト、である。Fig. 1 is a schematic diagram of an exposure apparatus according to the present invention, Fig. 2 is a cross-sectional view of a sample and a photoresist on the sample in a direction perpendicular to the moving direction of the irradiation source, and Fig. 3 is a diagram showing the features of the present invention. FIG. 3 is a diagram showing the shape of an opening in a certain correction plate. In addition, in the figure 1. ->te, 1...irradiation source, 4...
...Shutter, 7...Photomask, 8
...Sample, 9...Correction plate, 10...
...Photoresist.

Claims

[Scope of utility model registration request]

' A rectangular sample on which a photoresist with a thickness of several micrometers to several tens of micrometers is formed on the surface and a photomask on which a pattern to be transferred to the sample is formed on the lower surface of a transparent glass plate or plastic film are brought into close contact or in close proximity. an irradiation source that irradiates ultraviolet rays to the irradiated object, which is internally equipped with an optical system that converts light from a light source such as a mercury lamp or a xenon lamp into nearly parallel light; a driving device that moves either the irradiation object or the irradiation source; and a correction plate that causes a change in the length of the opening in the moving direction.