JPS58108424U - pattern inspection equipment - Google Patents
pattern inspection equipmentInfo
- Publication number
- JPS58108424U JPS58108424U JP18641782U JP18641782U JPS58108424U JP S58108424 U JPS58108424 U JP S58108424U JP 18641782 U JP18641782 U JP 18641782U JP 18641782 U JP18641782 U JP 18641782U JP S58108424 U JPS58108424 U JP S58108424U
- Authority
- JP
- Japan
- Prior art keywords
- pattern inspection
- pattern
- inspection equipment
- photodetecting element
- photodetecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の実施例の構成を示す説明図、第２図は
本考案装置の機能説明図、第３図は本考案の実施例の信
号による判定回路の１例の説明図であり、図中、１はレ
ーザ光源、２はコリメータレンズ、３は光偏光素子、４
は走査レンズ、５はフォトマスク、６は光検知器、６１
１ ６２１ ６３は光検−知素子、１１．．１１□、１
１３は比較器、１２□、１２□、１２３は基準電圧発生
器、−１３はＯＲ回路、１４１．１４２はＡＮＤ回路、
１５はパターン形状判定論理回路を示す。FIG. 1 is an explanatory diagram showing the configuration of an embodiment of the present invention, FIG. 2 is an explanatory diagram of the functions of the device of the present invention, and FIG. 3 is an explanatory diagram of an example of the signal-based determination circuit of the embodiment of the present invention. , in the figure, 1 is a laser light source, 2 is a collimator lens, 3 is a light polarizing element, 4
is a scanning lens, 5 is a photomask, 6 is a photodetector, 61
1 621 63 is a photodetecting element; 11. ．． 11□, 1
13 is a comparator, 12□, 12□, 123 is a reference voltage generator, -13 is an OR circuit, 141.142 is an AND circuit,
Reference numeral 15 indicates a pattern shape determination logic circuit.
Claims (1)
ーン上を走査する手段と、被検査試料を挾んで走査手段
と反対側に設けられ、光軸を中心軸とし、その中心軸か
らの距離を夫々異ならせて同心円状に配置した複数の円
帯状の光検知素子と、各光検知素子に与えられた基準電
圧を超えて出力の得られた光検知素子の位置によりパタ
ーンの特徴を判定する論理回路とを備えたことを特徴と
するパターン検査装置。A means for scanning a pattern on a sample to be inspected with a focused beam of coherent light; A logic circuit that determines the characteristics of a pattern based on a plurality of circular band-shaped photodetecting elements arranged in different concentric circles and the position of the photodetecting element whose output exceeds the reference voltage applied to each photodetecting element. A pattern inspection device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18641782U JPS58108424U (en) | 1982-12-09 | 1982-12-09 | pattern inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18641782U JPS58108424U (en) | 1982-12-09 | 1982-12-09 | pattern inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58108424U true JPS58108424U (en) | 1983-07-23 |
Family
ID=30102681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18641782U Pending JPS58108424U (en) | 1982-12-09 | 1982-12-09 | pattern inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58108424U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4876440A (en) * | 1972-01-13 | 1973-10-15 | ||
| JPS50110779A (en) * | 1974-02-06 | 1975-09-01 |
-
1982
- 1982-12-09 JP JP18641782U patent/JPS58108424U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4876440A (en) * | 1972-01-13 | 1973-10-15 | ||
| JPS50110779A (en) * | 1974-02-06 | 1975-09-01 |
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