JPS60143772U - Thin film manufacturing equipment - Google Patents
Thin film manufacturing equipmentInfo
- Publication number
- JPS60143772U JPS60143772U JP3214584U JP3214584U JPS60143772U JP S60143772 U JPS60143772 U JP S60143772U JP 3214584 U JP3214584 U JP 3214584U JP 3214584 U JP3214584 U JP 3214584U JP S60143772 U JPS60143772 U JP S60143772U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film manufacturing
- manufacturing equipment
- laser light
- reflective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による一実施例を示す模型図、第２図は
レーザ光の強度分布図、第３図は同実施例の要部拡大図
、第４図は第３図に示す要部のレニザ光強度分布の模式
図、第５図は同実施例の動作説明図である。Fig. 1 is a model diagram showing an embodiment of the present invention, Fig. 2 is a laser beam intensity distribution diagram, Fig. 3 is an enlarged view of the main part of the same embodiment, and Fig. 4 is the main part shown in Fig. 3. FIG. 5 is a schematic diagram of the lens laser light intensity distribution, and FIG. 5 is an explanatory diagram of the operation of the same embodiment.
Claims (1)
装置において、レーザ光の光路上にレーザ光を非単結晶
薄膜に方向付けるミラを配置し、該ミラは背面側に反射
面が形成され、入射面側に透明領域を残して一部にのる
反射膜が形成されてなり、透明領域と反射膜との境界番
、こ跨ってレーザ光を照射して双峰型レーザ光を形成す
ることを特徴とする薄膜製造装置。In an apparatus for recrystallizing a non-single-crystal thin film by irradiating it with laser light, a mirror is placed on the optical path of the laser light to direct the laser light toward the non-single-crystal thin film, and the mirror has a reflective surface on the back side. A reflective film is formed, leaving a transparent area on the incident surface side, and a reflective film is formed on a part of the surface, and the laser beam is irradiated across the boundary between the transparent area and the reflective film to generate a bimodal laser beam. A thin film manufacturing device characterized by forming a thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3214584U JPS60143772U (en) | 1984-03-05 | 1984-03-05 | Thin film manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3214584U JPS60143772U (en) | 1984-03-05 | 1984-03-05 | Thin film manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60143772U true JPS60143772U (en) | 1985-09-24 |
Family
ID=30533386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3214584U Pending JPS60143772U (en) | 1984-03-05 | 1984-03-05 | Thin film manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60143772U (en) |
-
1984
- 1984-03-05 JP JP3214584U patent/JPS60143772U/en active Pending
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