JPH02113154U - - Google Patents
Info
- Publication number
- JPH02113154U JPH02113154U JP2027389U JP2027389U JPH02113154U JP H02113154 U JPH02113154 U JP H02113154U JP 2027389 U JP2027389 U JP 2027389U JP 2027389 U JP2027389 U JP 2027389U JP H02113154 U JPH02113154 U JP H02113154U
- Authority
- JP
- Japan
- Prior art keywords
- reflected light
- specimen
- light
- imaged
- illuminates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
第１図は本考案に係る光学系統図、第２図は本
考案を実施する装置の系統図、第３図は表面反射
と裏面反射及び遮板の関係を示す図、第４図は、
試料面に照射する光束の形状を示す図、第５図は
従来の裏面反射の確認方法を示す説明図である。
１…光源、２…分光器、３…トロイダルミラー
、４…試料光、１１…細隙、１２…結像レンズ、
１３，１６，１７，１８…ミラー、１４…試料、
１５…遮板、１９…積分球、２０…光電子増倍管
。
FIG. 1 is an optical system diagram according to the present invention, FIG. 2 is a system diagram of an apparatus implementing the present invention, FIG. 3 is a diagram showing the relationship between front surface reflection, back surface reflection and shielding plates, and FIG.
FIG. 5 is a diagram showing the shape of a light beam irradiated onto a sample surface, and is an explanatory diagram showing a conventional method for confirming backside reflection. DESCRIPTION OF SYMBOLS 1... Light source, 2... Spectroscope, 3... Toroidal mirror, 4... Sample light, 11... Slit, 12... Imaging lens,
13, 16, 17, 18...mirror, 14...sample,
15... Shield plate, 19... Integrating sphere, 20... Photomultiplier tube.
Claims (1)
を照射し、照射角度が検体に対し一定の角度を有
し、検体の表面に到達する付近に光束が集光結像
するように設定し、結像する光束の幅を表面反射
光と裏面反射光との間隔より狭く定めることによ
り表面反射光と裏面反射光とを分離し両反射光の
中間部に刃先を持つ遮板を置いて表面反射光を遮
断し裏面反射光のみを捕促し検出することを特徴
とする検体の裏面反射測定装置。 The light emitted from the light source passes through a narrow gap and illuminates the specimen using a condensing system, and the irradiation angle is set at a constant angle to the specimen, and the beam is set so that it is focused and imaged near the point where it reaches the surface of the specimen. Then, by setting the width of the light beam to be imaged narrower than the interval between the front reflected light and the back reflected light, the front reflected light and the back reflected light are separated, and a shielding plate with a cutting edge is placed between the two reflected lights. A back reflection measuring device for a specimen, which is characterized by blocking the front reflected light and capturing and detecting only the back reflected light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2027389U JPH02113154U (en) | 1989-02-27 | 1989-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2027389U JPH02113154U (en) | 1989-02-27 | 1989-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113154U true JPH02113154U (en) | 1990-09-11 |
Family
ID=31236502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2027389U Pending JPH02113154U (en) | 1989-02-27 | 1989-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113154U (en) |
-
1989
- 1989-02-27 JP JP2027389U patent/JPH02113154U/ja active Pending
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