JPS61190132U - - Google Patents
Info
- Publication number
- JPS61190132U JPS61190132U JP7434985U JP7434985U JPS61190132U JP S61190132 U JPS61190132 U JP S61190132U JP 7434985 U JP7434985 U JP 7434985U JP 7434985 U JP7434985 U JP 7434985U JP S61190132 U JPS61190132 U JP S61190132U
- Authority
- JP
- Japan
- Prior art keywords
- correction plate
- reactive ion
- ion etching
- etched
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 10
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7434985U JPS61190132U (de) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7434985U JPS61190132U (de) | 1985-05-20 | 1985-05-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61190132U true JPS61190132U (de) | 1986-11-27 |
Family
ID=30614564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7434985U Pending JPS61190132U (de) | 1985-05-20 | 1985-05-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61190132U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62108527A (ja) * | 1985-11-06 | 1987-05-19 | Anelva Corp | ドライエツチング装置 |
JPH01298182A (ja) * | 1988-05-27 | 1989-12-01 | Hitachi Ltd | エッチング装置 |
-
1985
- 1985-05-20 JP JP7434985U patent/JPS61190132U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62108527A (ja) * | 1985-11-06 | 1987-05-19 | Anelva Corp | ドライエツチング装置 |
JPH01298182A (ja) * | 1988-05-27 | 1989-12-01 | Hitachi Ltd | エッチング装置 |
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