JPS6118859B2 - - Google Patents

Info

Publication number
JPS6118859B2
JPS6118859B2 JP15196177A JP15196177A JPS6118859B2 JP S6118859 B2 JPS6118859 B2 JP S6118859B2 JP 15196177 A JP15196177 A JP 15196177A JP 15196177 A JP15196177 A JP 15196177A JP S6118859 B2 JPS6118859 B2 JP S6118859B2
Authority
JP
Japan
Prior art keywords
conductive film
pellets
defective
semiconductor
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15196177A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5483774A (en
Inventor
Kenji Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP15196177A priority Critical patent/JPS5483774A/ja
Publication of JPS5483774A publication Critical patent/JPS5483774A/ja
Publication of JPS6118859B2 publication Critical patent/JPS6118859B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Dicing (AREA)
JP15196177A 1977-12-16 1977-12-16 Manufacture of semiconductor device Granted JPS5483774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15196177A JPS5483774A (en) 1977-12-16 1977-12-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15196177A JPS5483774A (en) 1977-12-16 1977-12-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5483774A JPS5483774A (en) 1979-07-04
JPS6118859B2 true JPS6118859B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-14

Family

ID=15529988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15196177A Granted JPS5483774A (en) 1977-12-16 1977-12-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5483774A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122528A (en) * 1981-01-23 1982-07-30 Nippon Telegr & Teleph Corp <Ntt> Drawing system for electron beam exposure apparatus
JPH0729637Y2 (ja) * 1987-05-09 1995-07-05 住友電気工業株式会社 半導体素子測定用治具
JP2011049337A (ja) * 2009-08-27 2011-03-10 Fuji Electric Systems Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5483774A (en) 1979-07-04

Similar Documents

Publication Publication Date Title
JPS6118859B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN211014592U (zh) 晶圆漏电测试装置
JPS5860529A (ja) 半導体チツプの識別方法
US5711848A (en) Non-product patterned particle test wafer and testing method therefor
JPH0685019A (ja) 半導体ウエハ及び半導体ウエハの検査方法
CN115308556A (zh) 晶圆测试用的定位标记结构、曝光区域及晶圆
JPS6130737B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6233433A (ja) 高耐圧半導体素子の製造方法
JPS621247B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63153880A (ja) 半導体レ−ザ装置の検査方法
JPH0236545A (ja) 半導体素子の測定装置
JPS6222448A (ja) Ｉｃの形成されたウエ−ハ
JPS59175739A (ja) 半導体素子の選別方法
JPS6225889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0673361B2 (ja) 半導体ウェーハ上の集積回路の試験方法
JPS6228567B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61193464A (ja) 半導体装置の検査におけるマ−キング方法
JPS6018928A (ja) 半導体装置
JPH0282548A (ja) 半導体ウェーハの検査方法
JPH0637157A (ja) 半導体ウエハ及び半導体ウエハの検査方法
JP2826400B2 (ja) 半導体装置の検査方法
JPH1050777A (ja) 半導体装置およびその製造方法
JPS63124442A (ja) 半導体素子の検査方法
JPS60101941A (ja) 半導体ペレツト外観検査装置
JPH0325948A (ja) 半導体集積回路