JPS61183965U - - Google Patents

Info

Publication number
JPS61183965U
JPS61183965U JP6506286U JP6506286U JPS61183965U JP S61183965 U JPS61183965 U JP S61183965U JP 6506286 U JP6506286 U JP 6506286U JP 6506286 U JP6506286 U JP 6506286U JP S61183965 U JPS61183965 U JP S61183965U
Authority
JP
Japan
Prior art keywords
gas
discharge device
discharge
space
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6506286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243867Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986065062U priority Critical patent/JPH0243867Y2/ja
Publication of JPS61183965U publication Critical patent/JPS61183965U/ja
Application granted granted Critical
Publication of JPH0243867Y2 publication Critical patent/JPH0243867Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1986065062U 1986-05-01 1986-05-01 Expired JPH0243867Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986065062U JPH0243867Y2 (OSRAM) 1986-05-01 1986-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986065062U JPH0243867Y2 (OSRAM) 1986-05-01 1986-05-01

Publications (2)

Publication Number Publication Date
JPS61183965U true JPS61183965U (OSRAM) 1986-11-17
JPH0243867Y2 JPH0243867Y2 (OSRAM) 1990-11-21

Family

ID=30596712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986065062U Expired JPH0243867Y2 (OSRAM) 1986-05-01 1986-05-01

Country Status (1)

Country Link
JP (1) JPH0243867Y2 (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104476A (en) * 1976-03-01 1977-09-01 Hitachi Ltd Ion spattering apparatus
JPS56152973A (en) * 1980-04-30 1981-11-26 Tokuda Seisakusho Ltd Sputter etching device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104476A (en) * 1976-03-01 1977-09-01 Hitachi Ltd Ion spattering apparatus
JPS56152973A (en) * 1980-04-30 1981-11-26 Tokuda Seisakusho Ltd Sputter etching device

Also Published As

Publication number Publication date
JPH0243867Y2 (OSRAM) 1990-11-21

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