JPS6118344B2 - - Google Patents
Info
- Publication number
- JPS6118344B2 JPS6118344B2 JP2075176A JP2075176A JPS6118344B2 JP S6118344 B2 JPS6118344 B2 JP S6118344B2 JP 2075176 A JP2075176 A JP 2075176A JP 2075176 A JP2075176 A JP 2075176A JP S6118344 B2 JPS6118344 B2 JP S6118344B2
- Authority
- JP
- Japan
- Prior art keywords
- type
- diffusion region
- region
- buried
- epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 description 57
- 239000003990 capacitor Substances 0.000 description 14
- 239000012535 impurity Substances 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2075176A JPS52103980A (en) | 1976-02-26 | 1976-02-26 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2075176A JPS52103980A (en) | 1976-02-26 | 1976-02-26 | Semiconductor integrated circuit device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58163026A Division JPS59130454A (ja) | 1983-09-05 | 1983-09-05 | 半導体集積回路装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52103980A JPS52103980A (en) | 1977-08-31 |
JPS6118344B2 true JPS6118344B2 (enrdf_load_stackoverflow) | 1986-05-12 |
Family
ID=12035881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2075176A Granted JPS52103980A (en) | 1976-02-26 | 1976-02-26 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52103980A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54166269U (enrdf_load_stackoverflow) * | 1978-05-15 | 1979-11-22 | ||
JPS5681961A (en) * | 1979-12-07 | 1981-07-04 | Hitachi Ltd | Semiconductor junction capacitor |
JPS604250A (ja) * | 1983-06-22 | 1985-01-10 | Nec Corp | 半導体集積回路装置 |
-
1976
- 1976-02-26 JP JP2075176A patent/JPS52103980A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS52103980A (en) | 1977-08-31 |
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