JPS61179584A - ジヨセフソン接合素子 - Google Patents
ジヨセフソン接合素子Info
- Publication number
- JPS61179584A JPS61179584A JP60019772A JP1977285A JPS61179584A JP S61179584 A JPS61179584 A JP S61179584A JP 60019772 A JP60019772 A JP 60019772A JP 1977285 A JP1977285 A JP 1977285A JP S61179584 A JPS61179584 A JP S61179584A
- Authority
- JP
- Japan
- Prior art keywords
- film
- etching
- substrate
- superconductor
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002887 superconductor Substances 0.000 claims abstract description 60
- 230000008878 coupling Effects 0.000 claims abstract description 16
- 238000010168 coupling process Methods 0.000 claims abstract description 16
- 238000005859 coupling reaction Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 abstract description 31
- 238000005530 etching Methods 0.000 abstract description 30
- 238000007493 shaping process Methods 0.000 abstract description 15
- 239000010408 film Substances 0.000 description 87
- 238000010586 diagram Methods 0.000 description 9
- 239000012212 insulator Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000005668 Josephson effect Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60019772A JPS61179584A (ja) | 1985-02-04 | 1985-02-04 | ジヨセフソン接合素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60019772A JPS61179584A (ja) | 1985-02-04 | 1985-02-04 | ジヨセフソン接合素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61179584A true JPS61179584A (ja) | 1986-08-12 |
| JPH055192B2 JPH055192B2 (enrdf_load_stackoverflow) | 1993-01-21 |
Family
ID=12008622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60019772A Granted JPS61179584A (ja) | 1985-02-04 | 1985-02-04 | ジヨセフソン接合素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61179584A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0266978A (ja) * | 1988-08-31 | 1990-03-07 | Nec Corp | 超伝導三端子素子 |
| JPH0272683A (ja) * | 1988-09-07 | 1990-03-12 | Shimadzu Corp | ジョセフソン接合素子 |
| US5949131A (en) * | 1991-02-25 | 1999-09-07 | Sumitomo Electric Industries, Ltd. | Junction between wires employing oxide superconductors and joining method therefor |
-
1985
- 1985-02-04 JP JP60019772A patent/JPS61179584A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0266978A (ja) * | 1988-08-31 | 1990-03-07 | Nec Corp | 超伝導三端子素子 |
| JPH0272683A (ja) * | 1988-09-07 | 1990-03-12 | Shimadzu Corp | ジョセフソン接合素子 |
| US5949131A (en) * | 1991-02-25 | 1999-09-07 | Sumitomo Electric Industries, Ltd. | Junction between wires employing oxide superconductors and joining method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH055192B2 (enrdf_load_stackoverflow) | 1993-01-21 |
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