JPS6117742U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS6117742U
JPS6117742U JP10339784U JP10339784U JPS6117742U JP S6117742 U JPS6117742 U JP S6117742U JP 10339784 U JP10339784 U JP 10339784U JP 10339784 U JP10339784 U JP 10339784U JP S6117742 U JPS6117742 U JP S6117742U
Authority
JP
Japan
Prior art keywords
tray
semiconductor manufacturing
held
manufacturing equipment
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10339784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019162Y2 (enExample
Inventor
幹生 毛利
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP10339784U priority Critical patent/JPS6117742U/ja
Publication of JPS6117742U publication Critical patent/JPS6117742U/ja
Application granted granted Critical
Publication of JPH019162Y2 publication Critical patent/JPH019162Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP10339784U 1984-07-09 1984-07-09 半導体製造装置 Granted JPS6117742U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10339784U JPS6117742U (ja) 1984-07-09 1984-07-09 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10339784U JPS6117742U (ja) 1984-07-09 1984-07-09 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6117742U true JPS6117742U (ja) 1986-02-01
JPH019162Y2 JPH019162Y2 (enExample) 1989-03-13

Family

ID=30662792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10339784U Granted JPS6117742U (ja) 1984-07-09 1984-07-09 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6117742U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132443A (ja) * 1986-11-22 1988-06-04 Tokuda Seisakusho Ltd ウエハ搬送装置
JP2009059741A (ja) * 2007-08-30 2009-03-19 Ulvac Japan Ltd 真空処理装置、基板搬送方法
JP2012025504A (ja) * 2010-07-21 2012-02-09 Otsuka Denshi Co Ltd 被搬送物回転装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132443A (ja) * 1986-11-22 1988-06-04 Tokuda Seisakusho Ltd ウエハ搬送装置
JP2009059741A (ja) * 2007-08-30 2009-03-19 Ulvac Japan Ltd 真空処理装置、基板搬送方法
JP2012025504A (ja) * 2010-07-21 2012-02-09 Otsuka Denshi Co Ltd 被搬送物回転装置
US8327997B2 (en) 2010-07-21 2012-12-11 Otsuka Electronics Co., Ltd. Transferred object rotating device

Also Published As

Publication number Publication date
JPH019162Y2 (enExample) 1989-03-13

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