JPS61176257U - - Google Patents

Info

Publication number
JPS61176257U
JPS61176257U JP5991685U JP5991685U JPS61176257U JP S61176257 U JPS61176257 U JP S61176257U JP 5991685 U JP5991685 U JP 5991685U JP 5991685 U JP5991685 U JP 5991685U JP S61176257 U JPS61176257 U JP S61176257U
Authority
JP
Japan
Prior art keywords
crucible
raw material
vapor deposition
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5991685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5991685U priority Critical patent/JPS61176257U/ja
Publication of JPS61176257U publication Critical patent/JPS61176257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5991685U 1985-04-22 1985-04-22 Pending JPS61176257U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5991685U JPS61176257U (cs) 1985-04-22 1985-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5991685U JPS61176257U (cs) 1985-04-22 1985-04-22

Publications (1)

Publication Number Publication Date
JPS61176257U true JPS61176257U (cs) 1986-11-04

Family

ID=30586781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5991685U Pending JPS61176257U (cs) 1985-04-22 1985-04-22

Country Status (1)

Country Link
JP (1) JPS61176257U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004211110A (ja) * 2002-12-26 2004-07-29 Fuji Electric Holdings Co Ltd 蒸着用るつぼ、蒸着装置および蒸着方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004211110A (ja) * 2002-12-26 2004-07-29 Fuji Electric Holdings Co Ltd 蒸着用るつぼ、蒸着装置および蒸着方法

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