JPS62182969U - - Google Patents
Info
- Publication number
- JPS62182969U JPS62182969U JP7117486U JP7117486U JPS62182969U JP S62182969 U JPS62182969 U JP S62182969U JP 7117486 U JP7117486 U JP 7117486U JP 7117486 U JP7117486 U JP 7117486U JP S62182969 U JPS62182969 U JP S62182969U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- shield plate
- heat shield
- thin film
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005684 electric field Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000007935 neutral effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117486U JPH0343228Y2 (cs) | 1986-05-14 | 1986-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117486U JPH0343228Y2 (cs) | 1986-05-14 | 1986-05-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182969U true JPS62182969U (cs) | 1987-11-20 |
| JPH0343228Y2 JPH0343228Y2 (cs) | 1991-09-10 |
Family
ID=30913489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7117486U Expired JPH0343228Y2 (cs) | 1986-05-14 | 1986-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343228Y2 (cs) |
-
1986
- 1986-05-14 JP JP7117486U patent/JPH0343228Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343228Y2 (cs) | 1991-09-10 |
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