JPS6327467U - - Google Patents
Info
- Publication number
- JPS6327467U JPS6327467U JP12086586U JP12086586U JPS6327467U JP S6327467 U JPS6327467 U JP S6327467U JP 12086586 U JP12086586 U JP 12086586U JP 12086586 U JP12086586 U JP 12086586U JP S6327467 U JPS6327467 U JP S6327467U
- Authority
- JP
- Japan
- Prior art keywords
- gun
- ion plating
- cluster
- generating
- cylindrical part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 claims 3
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12086586U JPS6327467U (cs) | 1986-08-05 | 1986-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12086586U JPS6327467U (cs) | 1986-08-05 | 1986-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6327467U true JPS6327467U (cs) | 1988-02-23 |
Family
ID=31009587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12086586U Pending JPS6327467U (cs) | 1986-08-05 | 1986-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327467U (cs) |
-
1986
- 1986-08-05 JP JP12086586U patent/JPS6327467U/ja active Pending
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