JPS61194949U - - Google Patents
Info
- Publication number
- JPS61194949U JPS61194949U JP7922285U JP7922285U JPS61194949U JP S61194949 U JPS61194949 U JP S61194949U JP 7922285 U JP7922285 U JP 7922285U JP 7922285 U JP7922285 U JP 7922285U JP S61194949 U JPS61194949 U JP S61194949U
- Authority
- JP
- Japan
- Prior art keywords
- heats
- raw material
- introduction pipe
- ionization chamber
- vaporization device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008016 vaporization Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000009834 vaporization Methods 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7922285U JPS61194949U (cs) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7922285U JPS61194949U (cs) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61194949U true JPS61194949U (cs) | 1986-12-04 |
Family
ID=30623932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7922285U Pending JPS61194949U (cs) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194949U (cs) |
-
1985
- 1985-05-29 JP JP7922285U patent/JPS61194949U/ja active Pending
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