JPS6155063U - - Google Patents

Info

Publication number
JPS6155063U
JPS6155063U JP13946784U JP13946784U JPS6155063U JP S6155063 U JPS6155063 U JP S6155063U JP 13946784 U JP13946784 U JP 13946784U JP 13946784 U JP13946784 U JP 13946784U JP S6155063 U JPS6155063 U JP S6155063U
Authority
JP
Japan
Prior art keywords
vapor deposition
target
vacuum chamber
attached
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13946784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13946784U priority Critical patent/JPS6155063U/ja
Publication of JPS6155063U publication Critical patent/JPS6155063U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13946784U 1984-09-17 1984-09-17 Pending JPS6155063U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13946784U JPS6155063U (cs) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13946784U JPS6155063U (cs) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6155063U true JPS6155063U (cs) 1986-04-14

Family

ID=30697846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13946784U Pending JPS6155063U (cs) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6155063U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168816A (ja) * 1985-01-18 1986-07-30 セイコーエプソン株式会社 透明導電性膜の形成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690975A (en) * 1979-12-25 1981-07-23 Toshiba Corp Sputtering apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690975A (en) * 1979-12-25 1981-07-23 Toshiba Corp Sputtering apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168816A (ja) * 1985-01-18 1986-07-30 セイコーエプソン株式会社 透明導電性膜の形成方法

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