JPH02119344U - - Google Patents

Info

Publication number
JPH02119344U
JPH02119344U JP2812789U JP2812789U JPH02119344U JP H02119344 U JPH02119344 U JP H02119344U JP 2812789 U JP2812789 U JP 2812789U JP 2812789 U JP2812789 U JP 2812789U JP H02119344 U JPH02119344 U JP H02119344U
Authority
JP
Japan
Prior art keywords
sample
oven
ion source
chamber
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2812789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542603Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2812789U priority Critical patent/JPH0542603Y2/ja
Publication of JPH02119344U publication Critical patent/JPH02119344U/ja
Application granted granted Critical
Publication of JPH0542603Y2 publication Critical patent/JPH0542603Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2812789U 1989-03-14 1989-03-14 Expired - Lifetime JPH0542603Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2812789U JPH0542603Y2 (cs) 1989-03-14 1989-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2812789U JPH0542603Y2 (cs) 1989-03-14 1989-03-14

Publications (2)

Publication Number Publication Date
JPH02119344U true JPH02119344U (cs) 1990-09-26
JPH0542603Y2 JPH0542603Y2 (cs) 1993-10-27

Family

ID=31251227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2812789U Expired - Lifetime JPH0542603Y2 (cs) 1989-03-14 1989-03-14

Country Status (1)

Country Link
JP (1) JPH0542603Y2 (cs)

Also Published As

Publication number Publication date
JPH0542603Y2 (cs) 1993-10-27

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