JPS6117549Y2 - - Google Patents
Info
- Publication number
- JPS6117549Y2 JPS6117549Y2 JP6426180U JP6426180U JPS6117549Y2 JP S6117549 Y2 JPS6117549 Y2 JP S6117549Y2 JP 6426180 U JP6426180 U JP 6426180U JP 6426180 U JP6426180 U JP 6426180U JP S6117549 Y2 JPS6117549 Y2 JP S6117549Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- disk
- mask
- angle
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000151 deposition Methods 0.000 claims description 31
- 230000008021 deposition Effects 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000007740 vapor deposition Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000696 magnetic material Substances 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6426180U JPS6117549Y2 (fr) | 1980-05-10 | 1980-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6426180U JPS6117549Y2 (fr) | 1980-05-10 | 1980-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56167030U JPS56167030U (fr) | 1981-12-10 |
| JPS6117549Y2 true JPS6117549Y2 (fr) | 1986-05-29 |
Family
ID=29658459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6426180U Expired JPS6117549Y2 (fr) | 1980-05-10 | 1980-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6117549Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002077316A1 (fr) * | 2001-03-22 | 2002-10-03 | Nikon Corporation | Procede de formation d'un film, procede de fabrication d'un reflecteur de film multicouche, et dispositif de formation de film |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4617101B2 (ja) * | 2004-05-11 | 2011-01-19 | 株式会社昭和真空 | スパッタ装置 |
| JP4566681B2 (ja) * | 2004-10-06 | 2010-10-20 | 株式会社昭和真空 | スパッタ装置 |
-
1980
- 1980-05-10 JP JP6426180U patent/JPS6117549Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002077316A1 (fr) * | 2001-03-22 | 2002-10-03 | Nikon Corporation | Procede de formation d'un film, procede de fabrication d'un reflecteur de film multicouche, et dispositif de formation de film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56167030U (fr) | 1981-12-10 |
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