JPS61166039A - 誘電体絶縁分離基板 - Google Patents

誘電体絶縁分離基板

Info

Publication number
JPS61166039A
JPS61166039A JP60206527A JP20652785A JPS61166039A JP S61166039 A JPS61166039 A JP S61166039A JP 60206527 A JP60206527 A JP 60206527A JP 20652785 A JP20652785 A JP 20652785A JP S61166039 A JPS61166039 A JP S61166039A
Authority
JP
Japan
Prior art keywords
silicon
substrate
silicon polycrystalline
layers
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60206527A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342698B2 (cg-RX-API-DMAC10.html
Inventor
Junichiro Horiuchi
堀内　潤一郎
Hideyuki Yagi
秀幸 八木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60206527A priority Critical patent/JPS61166039A/ja
Publication of JPS61166039A publication Critical patent/JPS61166039A/ja
Publication of JPH0342698B2 publication Critical patent/JPH0342698B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Element Separation (AREA)
JP60206527A 1985-09-20 1985-09-20 誘電体絶縁分離基板 Granted JPS61166039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60206527A JPS61166039A (ja) 1985-09-20 1985-09-20 誘電体絶縁分離基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60206527A JPS61166039A (ja) 1985-09-20 1985-09-20 誘電体絶縁分離基板

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4436579A Division JPS55138229A (en) 1979-04-13 1979-04-13 Manufacture of dielectric material for insulation- separation substrate

Publications (2)

Publication Number Publication Date
JPS61166039A true JPS61166039A (ja) 1986-07-26
JPH0342698B2 JPH0342698B2 (cg-RX-API-DMAC10.html) 1991-06-28

Family

ID=16524837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60206527A Granted JPS61166039A (ja) 1985-09-20 1985-09-20 誘電体絶縁分離基板

Country Status (1)

Country Link
JP (1) JPS61166039A (cg-RX-API-DMAC10.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131280A (en) * 1975-05-12 1976-11-15 Hitachi Ltd Dielectric insulation separation base manufacturing process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131280A (en) * 1975-05-12 1976-11-15 Hitachi Ltd Dielectric insulation separation base manufacturing process

Also Published As

Publication number Publication date
JPH0342698B2 (cg-RX-API-DMAC10.html) 1991-06-28

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