JPS6153857B2 - - Google Patents

Info

Publication number
JPS6153857B2
JPS6153857B2 JP56192857A JP19285781A JPS6153857B2 JP S6153857 B2 JPS6153857 B2 JP S6153857B2 JP 56192857 A JP56192857 A JP 56192857A JP 19285781 A JP19285781 A JP 19285781A JP S6153857 B2 JPS6153857 B2 JP S6153857B2
Authority
JP
Japan
Prior art keywords
substrate
single crystal
polycrystalline semiconductor
chip
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56192857A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5895836A (ja
Inventor
Sakatoshi Ookubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56192857A priority Critical patent/JPS5895836A/ja
Publication of JPS5895836A publication Critical patent/JPS5895836A/ja
Publication of JPS6153857B2 publication Critical patent/JPS6153857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/019—
    • H10W10/10—

Landscapes

  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
JP56192857A 1981-12-02 1981-12-02 半導体集積回路の製造方法 Granted JPS5895836A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56192857A JPS5895836A (ja) 1981-12-02 1981-12-02 半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56192857A JPS5895836A (ja) 1981-12-02 1981-12-02 半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS5895836A JPS5895836A (ja) 1983-06-07
JPS6153857B2 true JPS6153857B2 (cg-RX-API-DMAC10.html) 1986-11-19

Family

ID=16298121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56192857A Granted JPS5895836A (ja) 1981-12-02 1981-12-02 半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS5895836A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5081061A (en) * 1990-02-23 1992-01-14 Harris Corporation Manufacturing ultra-thin dielectrically isolated wafers

Also Published As

Publication number Publication date
JPS5895836A (ja) 1983-06-07

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