JPS61154140A - ウエハロツト読取機 - Google Patents

ウエハロツト読取機

Info

Publication number
JPS61154140A
JPS61154140A JP59276295A JP27629584A JPS61154140A JP S61154140 A JPS61154140 A JP S61154140A JP 59276295 A JP59276295 A JP 59276295A JP 27629584 A JP27629584 A JP 27629584A JP S61154140 A JPS61154140 A JP S61154140A
Authority
JP
Japan
Prior art keywords
wafer
cassette
camera
comb
push
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59276295A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234176B2 (OSRAM
Inventor
Hidekazu Iwasaki
秀和 岩崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59276295A priority Critical patent/JPS61154140A/ja
Publication of JPS61154140A publication Critical patent/JPS61154140A/ja
Publication of JPH0234176B2 publication Critical patent/JPH0234176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0618—
    • H10P72/50—
JP59276295A 1984-12-27 1984-12-27 ウエハロツト読取機 Granted JPS61154140A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59276295A JPS61154140A (ja) 1984-12-27 1984-12-27 ウエハロツト読取機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59276295A JPS61154140A (ja) 1984-12-27 1984-12-27 ウエハロツト読取機

Publications (2)

Publication Number Publication Date
JPS61154140A true JPS61154140A (ja) 1986-07-12
JPH0234176B2 JPH0234176B2 (OSRAM) 1990-08-01

Family

ID=17567455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59276295A Granted JPS61154140A (ja) 1984-12-27 1984-12-27 ウエハロツト読取機

Country Status (1)

Country Link
JP (1) JPS61154140A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100758691B1 (ko) * 2006-04-20 2007-09-14 세메스 주식회사 웨이퍼 정렬 시스템 및 정렬 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0591357U (ja) * 1992-05-15 1993-12-14 道夫 竹迫 フィッシングチェア

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54984A (en) * 1977-06-06 1979-01-06 Nec Corp Containing tool for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54984A (en) * 1977-06-06 1979-01-06 Nec Corp Containing tool for semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100758691B1 (ko) * 2006-04-20 2007-09-14 세메스 주식회사 웨이퍼 정렬 시스템 및 정렬 방법

Also Published As

Publication number Publication date
JPH0234176B2 (OSRAM) 1990-08-01

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