JPS61154137A - テストプロ−ブ組立体 - Google Patents

テストプロ−ブ組立体

Info

Publication number
JPS61154137A
JPS61154137A JP27577784A JP27577784A JPS61154137A JP S61154137 A JPS61154137 A JP S61154137A JP 27577784 A JP27577784 A JP 27577784A JP 27577784 A JP27577784 A JP 27577784A JP S61154137 A JPS61154137 A JP S61154137A
Authority
JP
Japan
Prior art keywords
probes
probe
holes
plates
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27577784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515067B2 (en:Method
Inventor
Seiichiro Sogo
相合　征一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP27577784A priority Critical patent/JPS61154137A/ja
Publication of JPS61154137A publication Critical patent/JPS61154137A/ja
Publication of JPH0515067B2 publication Critical patent/JPH0515067B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP27577784A 1984-12-27 1984-12-27 テストプロ−ブ組立体 Granted JPS61154137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27577784A JPS61154137A (ja) 1984-12-27 1984-12-27 テストプロ−ブ組立体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27577784A JPS61154137A (ja) 1984-12-27 1984-12-27 テストプロ−ブ組立体

Publications (2)

Publication Number Publication Date
JPS61154137A true JPS61154137A (ja) 1986-07-12
JPH0515067B2 JPH0515067B2 (en:Method) 1993-02-26

Family

ID=17560253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27577784A Granted JPS61154137A (ja) 1984-12-27 1984-12-27 テストプロ−ブ組立体

Country Status (1)

Country Link
JP (1) JPS61154137A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63262850A (ja) * 1987-04-21 1988-10-31 Tokyo Electron Ltd プロ−ブカ−ド
JPH01276073A (ja) * 1988-04-28 1989-11-06 Tokyo Electron Ltd プローブ装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561314U (en:Method) * 1979-06-18 1981-01-08
JPS5654096A (en) * 1979-10-05 1981-05-13 Nippon Electric Co Device for inspecting printed board
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS58148935U (ja) * 1982-03-31 1983-10-06 日本電子材料株式会社 プロ−ブカ−ド
JPS58173841A (ja) * 1982-04-03 1983-10-12 Nippon Denshi Zairyo Kk プロ−ブカ−ド

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561314U (en:Method) * 1979-06-18 1981-01-08
JPS5654096A (en) * 1979-10-05 1981-05-13 Nippon Electric Co Device for inspecting printed board
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS58148935U (ja) * 1982-03-31 1983-10-06 日本電子材料株式会社 プロ−ブカ−ド
JPS58173841A (ja) * 1982-04-03 1983-10-12 Nippon Denshi Zairyo Kk プロ−ブカ−ド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63262850A (ja) * 1987-04-21 1988-10-31 Tokyo Electron Ltd プロ−ブカ−ド
JPH01276073A (ja) * 1988-04-28 1989-11-06 Tokyo Electron Ltd プローブ装置

Also Published As

Publication number Publication date
JPH0515067B2 (en:Method) 1993-02-26

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