JPS61153960U - - Google Patents
Info
- Publication number
- JPS61153960U JPS61153960U JP3726485U JP3726485U JPS61153960U JP S61153960 U JPS61153960 U JP S61153960U JP 3726485 U JP3726485 U JP 3726485U JP 3726485 U JP3726485 U JP 3726485U JP S61153960 U JPS61153960 U JP S61153960U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- image
- detection signal
- electron beam
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 4
- 238000010894 electron beam technology Methods 0.000 claims 4
- 238000003384 imaging method Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001000 micrograph Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3726485U JPS61153960U (da) | 1985-03-15 | 1985-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3726485U JPS61153960U (da) | 1985-03-15 | 1985-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61153960U true JPS61153960U (da) | 1986-09-24 |
Family
ID=30543188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3726485U Pending JPS61153960U (da) | 1985-03-15 | 1985-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61153960U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112596A (ja) * | 2006-10-30 | 2008-05-15 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
-
1985
- 1985-03-15 JP JP3726485U patent/JPS61153960U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112596A (ja) * | 2006-10-30 | 2008-05-15 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
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