JPS61147030A - 清浄作業台 - Google Patents

清浄作業台

Info

Publication number
JPS61147030A
JPS61147030A JP26837084A JP26837084A JPS61147030A JP S61147030 A JPS61147030 A JP S61147030A JP 26837084 A JP26837084 A JP 26837084A JP 26837084 A JP26837084 A JP 26837084A JP S61147030 A JPS61147030 A JP S61147030A
Authority
JP
Japan
Prior art keywords
blower
clean
air
partition wall
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26837084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570051B2 (enrdf_load_stackoverflow
Inventor
Keiichiro Oi
大井　慶一郎
Tatsuo Yoshitomi
吉富　達夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Techno Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Techno Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Techno Engineering Co Ltd
Priority to JP26837084A priority Critical patent/JPS61147030A/ja
Publication of JPS61147030A publication Critical patent/JPS61147030A/ja
Publication of JPH0570051B2 publication Critical patent/JPH0570051B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP26837084A 1984-12-21 1984-12-21 清浄作業台 Granted JPS61147030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26837084A JPS61147030A (ja) 1984-12-21 1984-12-21 清浄作業台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26837084A JPS61147030A (ja) 1984-12-21 1984-12-21 清浄作業台

Publications (2)

Publication Number Publication Date
JPS61147030A true JPS61147030A (ja) 1986-07-04
JPH0570051B2 JPH0570051B2 (enrdf_load_stackoverflow) 1993-10-04

Family

ID=17457558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26837084A Granted JPS61147030A (ja) 1984-12-21 1984-12-21 清浄作業台

Country Status (1)

Country Link
JP (1) JPS61147030A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004031928A (ja) * 2002-05-07 2004-01-29 Seiko Epson Corp 清浄作業台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532066Y1 (enrdf_load_stackoverflow) * 1967-04-27 1970-12-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532066Y1 (enrdf_load_stackoverflow) * 1967-04-27 1970-12-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004031928A (ja) * 2002-05-07 2004-01-29 Seiko Epson Corp 清浄作業台

Also Published As

Publication number Publication date
JPH0570051B2 (enrdf_load_stackoverflow) 1993-10-04

Similar Documents

Publication Publication Date Title
KR20060103100A (ko) 팬·필터 유닛 및 이것을 구비한 크린 부스
CN113874112A (zh) 安全柜
JPH0322547B2 (enrdf_load_stackoverflow)
JPS61147030A (ja) 清浄作業台
JP3443494B2 (ja) チャンバー型グローブボックス
JPS6127435A (ja) 空気清浄化システムに於る汚染空気の誘引混入防止装置
JPH0576781A (ja) クリーンドラフトチヤンバー
EP0768498A2 (de) Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume
JPH05116863A (ja) エレベータのかご内清浄装置
JPH06178907A (ja) クリーンベンチ及びその配列構造
CN113719947A (zh) 一种水洗空气装置、空调室内机和空调
JPH0212512Y2 (enrdf_load_stackoverflow)
JPS626428Y2 (enrdf_load_stackoverflow)
JPS6034279Y2 (ja) 無塵室装置
CN211098219U (zh) 一种新型精密过滤器
JPS61205741A (ja) クリ−ンベンチ
JPH0515718A (ja) 外気導入型空気清浄機
JPS6222933A (ja) 空気清浄装置
JPH01281350A (ja) クリーンルーム
JPH07225Y2 (ja) クリーンユニット
JPH068695B2 (ja) クリ−ンル−ム
JP5343318B2 (ja) 超薄型ファンフィルターユニット
JPS61175427A (ja) 空気清浄装置
JPH0745945B2 (ja) クリーンルームの床下二層構造
JPH05346239A (ja) 清浄室対応空気調和システム

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees