JPS6114655B2 - - Google Patents

Info

Publication number
JPS6114655B2
JPS6114655B2 JP54002336A JP233679A JPS6114655B2 JP S6114655 B2 JPS6114655 B2 JP S6114655B2 JP 54002336 A JP54002336 A JP 54002336A JP 233679 A JP233679 A JP 233679A JP S6114655 B2 JPS6114655 B2 JP S6114655B2
Authority
JP
Japan
Prior art keywords
polishing
slurry
silica
silicon
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54002336A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54128890A (en
Inventor
Guremuza Rimantasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WR Grace and Co
Original Assignee
WR Grace and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WR Grace and Co filed Critical WR Grace and Co
Publication of JPS54128890A publication Critical patent/JPS54128890A/ja
Publication of JPS6114655B2 publication Critical patent/JPS6114655B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P52/402—
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP233679A 1978-01-16 1979-01-16 Composition for polishing silicon and germanium Granted JPS54128890A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/869,402 US4260396A (en) 1978-01-16 1978-01-16 Compositions for polishing silicon and germanium

Publications (2)

Publication Number Publication Date
JPS54128890A JPS54128890A (en) 1979-10-05
JPS6114655B2 true JPS6114655B2 (cg-RX-API-DMAC10.html) 1986-04-19

Family

ID=25353488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP233679A Granted JPS54128890A (en) 1978-01-16 1979-01-16 Composition for polishing silicon and germanium

Country Status (9)

Country Link
US (1) US4260396A (cg-RX-API-DMAC10.html)
JP (1) JPS54128890A (cg-RX-API-DMAC10.html)
BE (1) BE873482A (cg-RX-API-DMAC10.html)
DE (1) DE2901401A1 (cg-RX-API-DMAC10.html)
DK (1) DK15979A (cg-RX-API-DMAC10.html)
FR (1) FR2414387A1 (cg-RX-API-DMAC10.html)
GB (1) GB2013234B (cg-RX-API-DMAC10.html)
IT (1) IT1110025B (cg-RX-API-DMAC10.html)
NL (1) NL7900298A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445231U (cg-RX-API-DMAC10.html) * 1990-08-20 1992-04-16
JP2002353175A (ja) * 2001-05-25 2002-12-06 Ekc Technology Kk 酸化セリウム研磨剤及び基板の製造方法

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474824A (en) 1978-05-24 1984-10-02 W. R. Grace & Co. Methods of preparing hydrous silica gels
US5037484A (en) * 1981-04-20 1991-08-06 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
US4493783A (en) * 1981-04-20 1985-01-15 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
US4792414A (en) * 1981-04-20 1988-12-20 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
US4670060A (en) * 1981-04-20 1987-06-02 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
JPS5935429A (ja) * 1982-08-12 1984-02-27 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 半導体ウエハの製造方法
DE3236180A1 (de) * 1982-09-30 1984-04-05 Akzo Gmbh, 5600 Wuppertal Mit tensid beladene kieselsaeure, verfahren zu deren herstellung und deren verwendung
JPS61136909A (ja) * 1984-12-04 1986-06-24 Mitsubishi Chem Ind Ltd 無水ケイ酸の水分散液組成物
US4752628A (en) * 1987-05-15 1988-06-21 Nalco Chemical Company Concentrated lapping slurries
DE3884778T2 (de) * 1987-12-29 1994-05-11 Du Pont Feine Polierzusammensetzung für Plaketten.
JP2782692B2 (ja) * 1988-06-03 1998-08-06 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー シリコーンウェハー用研磨組成物
US4867757A (en) * 1988-09-09 1989-09-19 Nalco Chemical Company Lapping slurry compositions with improved lap rate
US5234493A (en) * 1988-11-08 1993-08-10 Rhone-Poulenc Chimie Stable, pumpable aqueous suspensions of precipitated silica particulates
FR2638756B1 (fr) * 1988-11-08 1992-04-24 Rhone Poulenc Chimie Suspension aqueuse stable de silice de precipitation
US5352277A (en) * 1988-12-12 1994-10-04 E. I. Du Pont De Nemours & Company Final polishing composition
JP2714411B2 (ja) * 1988-12-12 1998-02-16 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー ウェハーのファイン研摩用組成物
CA2126137A1 (en) * 1993-06-23 1994-12-24 Robert Anthony Labrash Low misting sprayable dispersion of colloidal silica with xanthan gum
US5709593A (en) * 1995-10-27 1998-01-20 Applied Materials, Inc. Apparatus and method for distribution of slurry in a chemical mechanical polishing system
KR970042941A (ko) * 1995-12-29 1997-07-26 베일리 웨인 피 기계적 화학적 폴리싱 공정을 위한 폴리싱 합성물
US5645736A (en) * 1995-12-29 1997-07-08 Symbios Logic Inc. Method for polishing a wafer
WO1998047976A1 (de) * 1997-04-17 1998-10-29 Merck Patent Gmbh Pufferlösungen für suspensionen, verwendbar zum chemisch-mechanischen polieren
JPH10309660A (ja) * 1997-05-07 1998-11-24 Tokuyama Corp 仕上げ研磨剤
TW419518B (en) * 1998-02-20 2001-01-21 Ind Tech Res Inst Non-Newtonian-fluid-behaviored formulation
US6685540B2 (en) 2001-11-27 2004-02-03 Cabot Microelectronics Corporation Polishing pad comprising particles with a solid core and polymeric shell
US7405098B2 (en) * 2005-02-28 2008-07-29 Sharp Laboratories Of America, Inc. Smooth surface liquid phase epitaxial germanium
US20210332264A1 (en) * 2020-04-23 2021-10-28 Fujimi Corporation Novel polishing vehicles and compositions with tunable viscosity
CN115466573B (zh) * 2022-09-05 2024-02-20 广州飞雪芯材有限公司 一种用于单晶硅晶圆片的抛光液及其应用

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2765223A (en) * 1952-08-05 1956-10-02 Lea Mfg Company Buffing compositions
US3170273A (en) * 1963-01-10 1965-02-23 Monsanto Co Process for polishing semiconductor materials
US3275460A (en) * 1964-11-23 1966-09-27 Foseco Int Mold dressings for use in foundry practice
US3428464A (en) * 1965-02-02 1969-02-18 Alchem Ltd Refractory coating compositions
US3462251A (en) * 1965-10-08 1969-08-19 Ford Motor Co Aqueous based lapping composition
US3328141A (en) * 1966-02-28 1967-06-27 Tizon Chemical Corp Process for polishing crystalline silicon
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
US3455705A (en) * 1968-03-07 1969-07-15 Du Pont Silicious compositions for coating heat sensitive surfaces
US3619962A (en) * 1969-09-25 1971-11-16 Gordon C Combe Metal cleaner
US3715842A (en) * 1970-07-02 1973-02-13 Tizon Chem Corp Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces
US3817727A (en) * 1972-03-17 1974-06-18 Union Carbide Corp Abrasive polishing suspensions and method for making same
US3821008A (en) * 1972-03-20 1974-06-28 Gen Mills Chem Inc Suspending agent for refractory paints
DE2248719A1 (de) * 1972-10-04 1974-04-11 Alexandr Serafimowits Artjomow Poliermittel fuer oberflaechen von festen koerpern
GB1471278A (en) * 1973-07-06 1977-04-21 Colgate Palmolive Co Liquid abrasive compositions
US4038048A (en) * 1975-02-14 1977-07-26 Thrower Jr Herbert T Lapping composition containing a carboxy vinyl polymer
US4057939A (en) * 1975-12-05 1977-11-15 International Business Machines Corporation Silicon wafer polishing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445231U (cg-RX-API-DMAC10.html) * 1990-08-20 1992-04-16
JP2002353175A (ja) * 2001-05-25 2002-12-06 Ekc Technology Kk 酸化セリウム研磨剤及び基板の製造方法

Also Published As

Publication number Publication date
IT1110025B (it) 1985-12-23
NL7900298A (nl) 1979-07-18
GB2013234B (en) 1982-09-02
IT7919307A0 (it) 1979-01-15
US4260396A (en) 1981-04-07
DE2901401A1 (de) 1979-07-19
DK15979A (da) 1979-07-17
JPS54128890A (en) 1979-10-05
BE873482A (fr) 1979-05-02
FR2414387A1 (fr) 1979-08-10
GB2013234A (en) 1979-08-08

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