FR2414387A1 - Compositions pour le polissage du silicium et du germanium et leur procede d'utilisation - Google Patents

Compositions pour le polissage du silicium et du germanium et leur procede d'utilisation

Info

Publication number
FR2414387A1
FR2414387A1 FR7900906A FR7900906A FR2414387A1 FR 2414387 A1 FR2414387 A1 FR 2414387A1 FR 7900906 A FR7900906 A FR 7900906A FR 7900906 A FR7900906 A FR 7900906A FR 2414387 A1 FR2414387 A1 FR 2414387A1
Authority
FR
France
Prior art keywords
compositions
germanium
polishing
polishing silicon
gum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR7900906A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GCP Products UK Ltd
WR Grace and Co Conn
Original Assignee
WR Grace Ltd
WR Grace and Co Conn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WR Grace Ltd, WR Grace and Co Conn filed Critical WR Grace Ltd
Publication of FR2414387A1 publication Critical patent/FR2414387A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Les compositions de l'invention peuvent être présentées sous forme de dispersions aqueuses et contiennent une silice particulaire servant d'agent de polissage et une gomme de xanthane ou gomme de carboxypolyméthyléne hydrosoluble comme agent de mise en suspension pour la silice. De telles compositions sont spécialement préférées pour le polissage des plaquettes de silicium utilisées dans les semi-conducteurs.
FR7900906A 1978-01-16 1979-01-15 Compositions pour le polissage du silicium et du germanium et leur procede d'utilisation Pending FR2414387A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/869,402 US4260396A (en) 1978-01-16 1978-01-16 Compositions for polishing silicon and germanium

Publications (1)

Publication Number Publication Date
FR2414387A1 true FR2414387A1 (fr) 1979-08-10

Family

ID=25353488

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7900906A Pending FR2414387A1 (fr) 1978-01-16 1979-01-15 Compositions pour le polissage du silicium et du germanium et leur procede d'utilisation

Country Status (9)

Country Link
US (1) US4260396A (fr)
JP (1) JPS54128890A (fr)
BE (1) BE873482A (fr)
DE (1) DE2901401A1 (fr)
DK (1) DK15979A (fr)
FR (1) FR2414387A1 (fr)
GB (1) GB2013234B (fr)
IT (1) IT1110025B (fr)
NL (1) NL7900298A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0103085A1 (fr) * 1982-08-12 1984-03-21 International Business Machines Corporation Procédé pour polir des plaques de semi-conducteur avec du montmorillonite en suspension
EP0322721A2 (fr) * 1987-12-29 1989-07-05 E.I. Du Pont De Nemours And Company Composition de polissage fin pour plaquettes
FR2638756A1 (fr) * 1988-11-08 1990-05-11 Rhone Poulenc Chimie Suspension aqueuse stable de silice de precipitation
EP0373501A2 (fr) * 1988-12-12 1990-06-20 E.I. Du Pont De Nemours And Company Composition pour le polissage fin de plaquettes
US5234493A (en) * 1988-11-08 1993-08-10 Rhone-Poulenc Chimie Stable, pumpable aqueous suspensions of precipitated silica particulates

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474824A (en) 1978-05-24 1984-10-02 W. R. Grace & Co. Methods of preparing hydrous silica gels
US5037484A (en) * 1981-04-20 1991-08-06 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
US4670060A (en) * 1981-04-20 1987-06-02 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
US4493783A (en) * 1981-04-20 1985-01-15 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
US4792414A (en) * 1981-04-20 1988-12-20 Alcon Laboratories, Inc. Cleaning agent for optical surfaces
DE3236180A1 (de) * 1982-09-30 1984-04-05 Akzo Gmbh, 5600 Wuppertal Mit tensid beladene kieselsaeure, verfahren zu deren herstellung und deren verwendung
JPS61136909A (ja) * 1984-12-04 1986-06-24 Mitsubishi Chem Ind Ltd 無水ケイ酸の水分散液組成物
US4752628A (en) * 1987-05-15 1988-06-21 Nalco Chemical Company Concentrated lapping slurries
KR930002764B1 (ko) * 1988-06-03 1993-04-10 닛뽄 몬산토 가부시끼가이샤 실리콘 웨이퍼 연마용 화합물
US4867757A (en) * 1988-09-09 1989-09-19 Nalco Chemical Company Lapping slurry compositions with improved lap rate
US5352277A (en) * 1988-12-12 1994-10-04 E. I. Du Pont De Nemours & Company Final polishing composition
JPH0445231U (fr) * 1990-08-20 1992-04-16
CA2126137A1 (fr) * 1993-06-23 1994-12-24 Robert Anthony Labrash Dispersion pulverisable de silice colloidale produisant peu de buee et additionnee de gomme de xanthane
US5709593A (en) * 1995-10-27 1998-01-20 Applied Materials, Inc. Apparatus and method for distribution of slurry in a chemical mechanical polishing system
KR970042941A (ko) * 1995-12-29 1997-07-26 베일리 웨인 피 기계적 화학적 폴리싱 공정을 위한 폴리싱 합성물
US5645736A (en) * 1995-12-29 1997-07-08 Symbios Logic Inc. Method for polishing a wafer
ATE214418T1 (de) * 1997-04-17 2002-03-15 Merck Patent Gmbh Pufferlösungen für suspensionen, verwendbar zum chemisch-mechanischen polieren
JPH10309660A (ja) 1997-05-07 1998-11-24 Tokuyama Corp 仕上げ研磨剤
TW419518B (en) * 1998-02-20 2001-01-21 Ind Tech Res Inst Non-Newtonian-fluid-behaviored formulation
JP5017574B2 (ja) * 2001-05-25 2012-09-05 エア プロダクツ アンド ケミカルズ インコーポレイテッド 酸化セリウム研磨剤及び基板の製造方法
US6685540B2 (en) 2001-11-27 2004-02-03 Cabot Microelectronics Corporation Polishing pad comprising particles with a solid core and polymeric shell
US7405098B2 (en) * 2005-02-28 2008-07-29 Sharp Laboratories Of America, Inc. Smooth surface liquid phase epitaxial germanium
CN115466573B (zh) * 2022-09-05 2024-02-20 广州飞雪芯材有限公司 一种用于单晶硅晶圆片的抛光液及其应用

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3170273A (en) * 1963-01-10 1965-02-23 Monsanto Co Process for polishing semiconductor materials
US3328141A (en) * 1966-02-28 1967-06-27 Tizon Chemical Corp Process for polishing crystalline silicon
GB1090526A (en) * 1965-10-08 1967-11-08 Ford Motor Co Lapping composition
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
US3715842A (en) * 1970-07-02 1973-02-13 Tizon Chem Corp Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces
FR2176798A1 (fr) * 1972-03-17 1973-11-02 Union Carbide Corp
DE2248719A1 (de) * 1972-10-04 1974-04-11 Alexandr Serafimowits Artjomow Poliermittel fuer oberflaechen von festen koerpern
FR2333847A1 (fr) * 1975-12-05 1977-07-01 Ibm Composition de polissage de substrats notamment semi-conducteurs

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2765223A (en) * 1952-08-05 1956-10-02 Lea Mfg Company Buffing compositions
US3275460A (en) * 1964-11-23 1966-09-27 Foseco Int Mold dressings for use in foundry practice
US3428464A (en) * 1965-02-02 1969-02-18 Alchem Ltd Refractory coating compositions
US3455705A (en) * 1968-03-07 1969-07-15 Du Pont Silicious compositions for coating heat sensitive surfaces
US3619962A (en) * 1969-09-25 1971-11-16 Gordon C Combe Metal cleaner
US3821008A (en) * 1972-03-20 1974-06-28 Gen Mills Chem Inc Suspending agent for refractory paints
GB1471278A (en) * 1973-07-06 1977-04-21 Colgate Palmolive Co Liquid abrasive compositions
US4038048A (en) * 1975-02-14 1977-07-26 Thrower Jr Herbert T Lapping composition containing a carboxy vinyl polymer

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3170273A (en) * 1963-01-10 1965-02-23 Monsanto Co Process for polishing semiconductor materials
GB1090526A (en) * 1965-10-08 1967-11-08 Ford Motor Co Lapping composition
US3328141A (en) * 1966-02-28 1967-06-27 Tizon Chemical Corp Process for polishing crystalline silicon
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process
US3715842A (en) * 1970-07-02 1973-02-13 Tizon Chem Corp Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces
FR2176798A1 (fr) * 1972-03-17 1973-11-02 Union Carbide Corp
US3817727A (en) * 1972-03-17 1974-06-18 Union Carbide Corp Abrasive polishing suspensions and method for making same
DE2248719A1 (de) * 1972-10-04 1974-04-11 Alexandr Serafimowits Artjomow Poliermittel fuer oberflaechen von festen koerpern
FR2333847A1 (fr) * 1975-12-05 1977-07-01 Ibm Composition de polissage de substrats notamment semi-conducteurs

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0103085A1 (fr) * 1982-08-12 1984-03-21 International Business Machines Corporation Procédé pour polir des plaques de semi-conducteur avec du montmorillonite en suspension
EP0322721A2 (fr) * 1987-12-29 1989-07-05 E.I. Du Pont De Nemours And Company Composition de polissage fin pour plaquettes
EP0322721A3 (fr) * 1987-12-29 1991-06-19 E.I. Du Pont De Nemours And Company Composition de polissage fin pour plaquettes
FR2638756A1 (fr) * 1988-11-08 1990-05-11 Rhone Poulenc Chimie Suspension aqueuse stable de silice de precipitation
EP0368722A1 (fr) * 1988-11-08 1990-05-16 Rhone-Poulenc Chimie Suspension aqueuse stable de silice de précipitation
US5234493A (en) * 1988-11-08 1993-08-10 Rhone-Poulenc Chimie Stable, pumpable aqueous suspensions of precipitated silica particulates
EP0373501A2 (fr) * 1988-12-12 1990-06-20 E.I. Du Pont De Nemours And Company Composition pour le polissage fin de plaquettes
EP0373501A3 (fr) * 1988-12-12 1992-01-22 E.I. Du Pont De Nemours And Company Composition pour le polissage fin de plaquettes

Also Published As

Publication number Publication date
DK15979A (da) 1979-07-17
IT7919307A0 (it) 1979-01-15
DE2901401A1 (de) 1979-07-19
GB2013234A (en) 1979-08-08
JPS6114655B2 (fr) 1986-04-19
IT1110025B (it) 1985-12-23
US4260396A (en) 1981-04-07
JPS54128890A (en) 1979-10-05
BE873482A (fr) 1979-05-02
GB2013234B (en) 1982-09-02
NL7900298A (nl) 1979-07-18

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