FR2176798A1 - - Google Patents

Info

Publication number
FR2176798A1
FR2176798A1 FR7309511A FR7309511A FR2176798A1 FR 2176798 A1 FR2176798 A1 FR 2176798A1 FR 7309511 A FR7309511 A FR 7309511A FR 7309511 A FR7309511 A FR 7309511A FR 2176798 A1 FR2176798 A1 FR 2176798A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7309511A
Other versions
FR2176798B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of FR2176798A1 publication Critical patent/FR2176798A1/fr
Application granted granted Critical
Publication of FR2176798B1 publication Critical patent/FR2176798B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Paints Or Removers (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
FR7309511A 1972-03-17 1973-03-16 Expired FR2176798B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00235651A US3817727A (en) 1972-03-17 1972-03-17 Abrasive polishing suspensions and method for making same

Publications (2)

Publication Number Publication Date
FR2176798A1 true FR2176798A1 (fr) 1973-11-02
FR2176798B1 FR2176798B1 (fr) 1976-05-21

Family

ID=22886391

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7309511A Expired FR2176798B1 (fr) 1972-03-17 1973-03-16

Country Status (4)

Country Link
US (1) US3817727A (fr)
JP (1) JPS536755B2 (fr)
CA (1) CA972167A (fr)
FR (1) FR2176798B1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2414387A1 (fr) * 1978-01-16 1979-08-10 Grace W R Ltd Compositions pour le polissage du silicium et du germanium et leur procede d'utilisation
FR2463173A1 (fr) * 1979-08-08 1981-02-20 Baikowski P Synth Sa Suspension de polissage de precision et son procede de preparation
WO1994022970A1 (fr) * 1993-04-02 1994-10-13 Nauchno-Proizvodstvennoe Obiedinenie 'altai' Compose destine a donner une superfinition a des surfaces

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144989A (fr) * 1974-05-13 1975-11-21
JPS5131793A (ja) * 1974-09-13 1976-03-18 Hitachi Chemical Co Ltd Yuyoseifuenooruhokozokuhorumuarudehitojushi no seiho
US4038048A (en) * 1975-02-14 1977-07-26 Thrower Jr Herbert T Lapping composition containing a carboxy vinyl polymer
FR2414071A1 (fr) * 1978-01-05 1979-08-03 Essilor Int Materiau de polissage, notamment pour lentille ophtalmique en matiere organique
US4358295A (en) * 1980-03-27 1982-11-09 Matsushita Electric Industrial Co., Ltd. Polishing method
EP0792515A1 (fr) * 1994-11-18 1997-09-03 Advanced Micro Devices, Inc. Procede de fabrication d'une suspension chimio-mecanique destinee au polissage et la suspension elle-meme
DE19642908A1 (de) * 1996-10-17 1998-04-23 Wacker Siltronic Halbleitermat Sägesuspension und Verfahren zum Abtrennen von Scheiben von einem Kristall
US5916855A (en) * 1997-03-26 1999-06-29 Advanced Micro Devices, Inc. Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films
US5855633A (en) * 1997-06-06 1999-01-05 Lockheed Martin Energy Systems, Inc. Lapping slurry
US7332457B2 (en) 2000-09-18 2008-02-19 Honeywell International Inc. Agricultural chemical suspensions
CN113718328B (zh) * 2021-11-04 2022-02-11 山东裕航特种合金装备有限公司 一种船用铝合金铸件的表面处理方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2783137A (en) * 1951-06-08 1957-02-26 Dow Chemical Co Grinding compositions and making of same
US3053646A (en) * 1960-07-15 1962-09-11 Dow Chemical Co Grinding and polishing compositions and method of making same
FR1323831A (fr) * 1962-04-10 1963-04-12 Procédé pour la fabrication d'un produit de nettoyage, utilisable notamment pour le nettoyage des vitres, des poêles ou des carreaux de cheminées

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2783137A (en) * 1951-06-08 1957-02-26 Dow Chemical Co Grinding compositions and making of same
US3053646A (en) * 1960-07-15 1962-09-11 Dow Chemical Co Grinding and polishing compositions and method of making same
FR1323831A (fr) * 1962-04-10 1963-04-12 Procédé pour la fabrication d'un produit de nettoyage, utilisable notamment pour le nettoyage des vitres, des poêles ou des carreaux de cheminées

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2414387A1 (fr) * 1978-01-16 1979-08-10 Grace W R Ltd Compositions pour le polissage du silicium et du germanium et leur procede d'utilisation
FR2463173A1 (fr) * 1979-08-08 1981-02-20 Baikowski P Synth Sa Suspension de polissage de precision et son procede de preparation
WO1994022970A1 (fr) * 1993-04-02 1994-10-13 Nauchno-Proizvodstvennoe Obiedinenie 'altai' Compose destine a donner une superfinition a des surfaces

Also Published As

Publication number Publication date
DE2312372A1 (de) 1973-09-20
JPS4913232A (fr) 1974-02-05
CA972167A (en) 1975-08-05
DE2312372B2 (de) 1976-02-12
FR2176798B1 (fr) 1976-05-21
US3817727A (en) 1974-06-18
JPS536755B2 (fr) 1978-03-10

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Legal Events

Date Code Title Description
ST Notification of lapse