JPS61143686A - 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 - Google Patents
寸法精度の優れた耐熱性治具用炭化珪素質焼結体Info
- Publication number
- JPS61143686A JPS61143686A JP59267006A JP26700684A JPS61143686A JP S61143686 A JPS61143686 A JP S61143686A JP 59267006 A JP59267006 A JP 59267006A JP 26700684 A JP26700684 A JP 26700684A JP S61143686 A JPS61143686 A JP S61143686A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- sintered body
- heat
- carbide sintered
- dimensional accuracy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 72
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 54
- 238000005245 sintering Methods 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 20
- 238000005452 bending Methods 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 18
- 238000010304 firing Methods 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 14
- 239000002245 particle Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 10
- 229910052796 boron Inorganic materials 0.000 description 10
- 229910052742 iron Inorganic materials 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 210000003739 neck Anatomy 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 239000007858 starting material Substances 0.000 description 5
- 239000003575 carbonaceous material Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 239000007770 graphite material Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000001272 pressureless sintering Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FHVDTGUDJYJELY-UHFFFAOYSA-N 6-{[2-carboxy-4,5-dihydroxy-6-(phosphanyloxy)oxan-3-yl]oxy}-4,5-dihydroxy-3-phosphanyloxane-2-carboxylic acid Chemical compound O1C(C(O)=O)C(P)C(O)C(O)C1OC1C(C(O)=O)OC(OP)C(O)C1O FHVDTGUDJYJELY-UHFFFAOYSA-N 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229920002261 Corn starch Polymers 0.000 description 1
- 229920001732 Lignosulfonate Polymers 0.000 description 1
- 208000034809 Product contamination Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000006230 acetylene black Substances 0.000 description 1
- 229940072056 alginate Drugs 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000011294 coal tar pitch Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000008120 corn starch Substances 0.000 description 1
- 229940099112 cornstarch Drugs 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PZLGBVIKYPHZTH-UHFFFAOYSA-N ethene;2-nonylphenol Chemical compound C=C.CCCCCCCCCC1=CC=CC=C1O PZLGBVIKYPHZTH-UHFFFAOYSA-N 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59267006A JPS61143686A (ja) | 1984-12-18 | 1984-12-18 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59267006A JPS61143686A (ja) | 1984-12-18 | 1984-12-18 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61143686A true JPS61143686A (ja) | 1986-07-01 |
| JPH0359033B2 JPH0359033B2 (enrdf_load_stackoverflow) | 1991-09-09 |
Family
ID=17438745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59267006A Granted JPS61143686A (ja) | 1984-12-18 | 1984-12-18 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61143686A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311589A (ja) * | 1986-07-01 | 1988-01-19 | イビデン株式会社 | 耐熱性治具及びその製造方法 |
| JPH0348231U (enrdf_load_stackoverflow) * | 1989-09-19 | 1991-05-08 | ||
| JPH05340678A (ja) * | 1992-06-08 | 1993-12-21 | Ngk Insulators Ltd | 耐スポーリング性棚板 |
| WO1993025859A1 (en) * | 1992-06-08 | 1993-12-23 | Ngk Insulators, Ltd. | Shelf plate having anti-spalling, anti-creep and oxidation resistant properties |
| US5840436A (en) * | 1992-06-08 | 1998-11-24 | Ngk Insulators, Ltd. | Spalling-resistant, creep-resistant and oxidation-resistant setters |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS578794A (en) * | 1980-06-17 | 1982-01-18 | Mitsubishi Chem Ind Ltd | Preparation of androstane-type steroid |
| JPS59101195A (ja) * | 1982-11-30 | 1984-06-11 | シャープ株式会社 | 洗濯機 |
-
1984
- 1984-12-18 JP JP59267006A patent/JPS61143686A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS578794A (en) * | 1980-06-17 | 1982-01-18 | Mitsubishi Chem Ind Ltd | Preparation of androstane-type steroid |
| JPS59101195A (ja) * | 1982-11-30 | 1984-06-11 | シャープ株式会社 | 洗濯機 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311589A (ja) * | 1986-07-01 | 1988-01-19 | イビデン株式会社 | 耐熱性治具及びその製造方法 |
| JPH0348231U (enrdf_load_stackoverflow) * | 1989-09-19 | 1991-05-08 | ||
| JPH05340678A (ja) * | 1992-06-08 | 1993-12-21 | Ngk Insulators Ltd | 耐スポーリング性棚板 |
| WO1993025859A1 (en) * | 1992-06-08 | 1993-12-23 | Ngk Insulators, Ltd. | Shelf plate having anti-spalling, anti-creep and oxidation resistant properties |
| US5840436A (en) * | 1992-06-08 | 1998-11-24 | Ngk Insulators, Ltd. | Spalling-resistant, creep-resistant and oxidation-resistant setters |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0359033B2 (enrdf_load_stackoverflow) | 1991-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |