JPH0518790B2 - - Google Patents

Info

Publication number
JPH0518790B2
JPH0518790B2 JP2076785A JP2076785A JPH0518790B2 JP H0518790 B2 JPH0518790 B2 JP H0518790B2 JP 2076785 A JP2076785 A JP 2076785A JP 2076785 A JP2076785 A JP 2076785A JP H0518790 B2 JPH0518790 B2 JP H0518790B2
Authority
JP
Japan
Prior art keywords
sintered body
oxide
oxide sintered
less
composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2076785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6291481A (ja
Inventor
Kyotaka Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP2076785A priority Critical patent/JPS6291481A/ja
Publication of JPS6291481A publication Critical patent/JPS6291481A/ja
Publication of JPH0518790B2 publication Critical patent/JPH0518790B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Sliding-Contact Bearings (AREA)
JP2076785A 1985-02-04 1985-02-04 寸法精度および摺動特性の優れた酸化物焼結体の製造方法 Granted JPS6291481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2076785A JPS6291481A (ja) 1985-02-04 1985-02-04 寸法精度および摺動特性の優れた酸化物焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2076785A JPS6291481A (ja) 1985-02-04 1985-02-04 寸法精度および摺動特性の優れた酸化物焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS6291481A JPS6291481A (ja) 1987-04-25
JPH0518790B2 true JPH0518790B2 (enrdf_load_stackoverflow) 1993-03-12

Family

ID=12036325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2076785A Granted JPS6291481A (ja) 1985-02-04 1985-02-04 寸法精度および摺動特性の優れた酸化物焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS6291481A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357333A (ja) * 1999-06-15 2000-12-26 Ntn Corp 光学式ピックアップ装置および支持軸

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132785A (ja) * 1985-12-05 1987-06-16 イビデン株式会社 セラミツクス質複合体からなる精密基準部品
JPS62270481A (ja) * 1986-05-15 1987-11-24 株式会社日立製作所 摺動材用セラミツクス
JP2665773B2 (ja) * 1988-07-29 1997-10-22 イビデン株式会社 摺動材料の製造方法
JP2006128368A (ja) 2004-10-28 2006-05-18 Tokyo Electron Ltd 基板処理装置、および基板回転装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357333A (ja) * 1999-06-15 2000-12-26 Ntn Corp 光学式ピックアップ装置および支持軸

Also Published As

Publication number Publication date
JPS6291481A (ja) 1987-04-25

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