JPS6291481A - 寸法精度および摺動特性の優れた酸化物焼結体の製造方法 - Google Patents
寸法精度および摺動特性の優れた酸化物焼結体の製造方法Info
- Publication number
- JPS6291481A JPS6291481A JP2076785A JP2076785A JPS6291481A JP S6291481 A JPS6291481 A JP S6291481A JP 2076785 A JP2076785 A JP 2076785A JP 2076785 A JP2076785 A JP 2076785A JP S6291481 A JPS6291481 A JP S6291481A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- oxide
- oxide composite
- porous
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims description 33
- 238000005245 sintering Methods 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 14
- 229920003002 synthetic resin Polymers 0.000 claims description 10
- 239000000057 synthetic resin Substances 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 9
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000007858 starting material Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 20
- 229920005989 resin Polymers 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- 238000010304 firing Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- -1 polyethylene Polymers 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 235000013339 cereals Nutrition 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 210000003739 neck Anatomy 0.000 description 3
- 229920001707 polybutylene terephthalate Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920005668 polycarbonate resin Polymers 0.000 description 2
- 239000004431 polycarbonate resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920013716 polyethylene resin Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 239000011145 styrene acrylonitrile resin Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 235000011511 Diospyros Nutrition 0.000 description 1
- 244000236655 Diospyros kaki Species 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 244000082204 Phyllostachys viridis Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- HCBIBCJNVBAKAB-UHFFFAOYSA-N Procaine hydrochloride Chemical compound Cl.CCN(CC)CCOC(=O)C1=CC=C(N)C=C1 HCBIBCJNVBAKAB-UHFFFAOYSA-N 0.000 description 1
- 241000269821 Scombridae Species 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000011354 acetal resin Substances 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 235000020640 mackerel Nutrition 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000021395 porridge Nutrition 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000015170 shellfish Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Sliding-Contact Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076785A JPS6291481A (ja) | 1985-02-04 | 1985-02-04 | 寸法精度および摺動特性の優れた酸化物焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076785A JPS6291481A (ja) | 1985-02-04 | 1985-02-04 | 寸法精度および摺動特性の優れた酸化物焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6291481A true JPS6291481A (ja) | 1987-04-25 |
| JPH0518790B2 JPH0518790B2 (enrdf_load_stackoverflow) | 1993-03-12 |
Family
ID=12036325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2076785A Granted JPS6291481A (ja) | 1985-02-04 | 1985-02-04 | 寸法精度および摺動特性の優れた酸化物焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6291481A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132785A (ja) * | 1985-12-05 | 1987-06-16 | イビデン株式会社 | セラミツクス質複合体からなる精密基準部品 |
| JPS62270481A (ja) * | 1986-05-15 | 1987-11-24 | 株式会社日立製作所 | 摺動材用セラミツクス |
| JPH0238388A (ja) * | 1988-07-29 | 1990-02-07 | Ibiden Co Ltd | 摺動材料の製造方法 |
| JP2006128368A (ja) * | 2004-10-28 | 2006-05-18 | Tokyo Electron Ltd | 基板処理装置、および基板回転装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000357333A (ja) * | 1999-06-15 | 2000-12-26 | Ntn Corp | 光学式ピックアップ装置および支持軸 |
-
1985
- 1985-02-04 JP JP2076785A patent/JPS6291481A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132785A (ja) * | 1985-12-05 | 1987-06-16 | イビデン株式会社 | セラミツクス質複合体からなる精密基準部品 |
| JPS62270481A (ja) * | 1986-05-15 | 1987-11-24 | 株式会社日立製作所 | 摺動材用セラミツクス |
| JPH0238388A (ja) * | 1988-07-29 | 1990-02-07 | Ibiden Co Ltd | 摺動材料の製造方法 |
| JP2006128368A (ja) * | 2004-10-28 | 2006-05-18 | Tokyo Electron Ltd | 基板処理装置、および基板回転装置 |
| US7842229B2 (en) | 2004-10-28 | 2010-11-30 | Tokyo Electron Limited | Substrate processing apparatus and substrate rotating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518790B2 (enrdf_load_stackoverflow) | 1993-03-12 |
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