JPS61121734U - - Google Patents

Info

Publication number
JPS61121734U
JPS61121734U JP412585U JP412585U JPS61121734U JP S61121734 U JPS61121734 U JP S61121734U JP 412585 U JP412585 U JP 412585U JP 412585 U JP412585 U JP 412585U JP S61121734 U JPS61121734 U JP S61121734U
Authority
JP
Japan
Prior art keywords
boat
gas
quartz tube
tube
end side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP412585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539624Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985004125U priority Critical patent/JPH0539624Y2/ja
Publication of JPS61121734U publication Critical patent/JPS61121734U/ja
Application granted granted Critical
Publication of JPH0539624Y2 publication Critical patent/JPH0539624Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985004125U 1985-01-18 1985-01-18 Expired - Lifetime JPH0539624Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985004125U JPH0539624Y2 (ko) 1985-01-18 1985-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985004125U JPH0539624Y2 (ko) 1985-01-18 1985-01-18

Publications (2)

Publication Number Publication Date
JPS61121734U true JPS61121734U (ko) 1986-07-31
JPH0539624Y2 JPH0539624Y2 (ko) 1993-10-07

Family

ID=30479395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985004125U Expired - Lifetime JPH0539624Y2 (ko) 1985-01-18 1985-01-18

Country Status (1)

Country Link
JP (1) JPH0539624Y2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0888193A (ja) * 1995-08-11 1996-04-02 Furendotetsuku Kenkyusho:Kk 半導体デバイスの製造装置
JPH09186096A (ja) * 1997-02-06 1997-07-15 Hitachi Ltd 処理方法

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49387A (ko) * 1972-04-17 1974-01-05
JPS4915366A (ko) * 1972-05-17 1974-02-09
JPS508782A (ko) * 1973-05-28 1975-01-29
JPS51124353U (ko) * 1975-03-31 1976-10-07
JPS52149969A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Method of putting wafers into and out from reaction tube in heat-treatment furnace
JPS5691417A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Heating treatment device for wafer
JPS57159015A (en) * 1981-03-26 1982-10-01 Nec Corp Film growing device
JPS5821025A (ja) * 1981-07-31 1983-02-07 Ogura Clutch Co Ltd 逆作動連結装置
JPS58118119A (ja) * 1982-01-07 1983-07-14 Nec Corp 反応性イオンプレ−テイング装置
JPS58138334U (ja) * 1982-03-12 1983-09-17 富士通株式会社 ウエハ自動給材機構
JPS5938377A (ja) * 1982-08-26 1984-03-02 Canon Inc プラズマｃｖｄ装置
JPS60193323A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体気相成長装置
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS6250970A (ja) * 1985-08-28 1987-03-05 林　器良 多相カ−ド読み取り方法及びその装置

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49387A (ko) * 1972-04-17 1974-01-05
JPS4915366A (ko) * 1972-05-17 1974-02-09
JPS508782A (ko) * 1973-05-28 1975-01-29
JPS51124353U (ko) * 1975-03-31 1976-10-07
JPS52149969A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Method of putting wafers into and out from reaction tube in heat-treatment furnace
JPS5691417A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Heating treatment device for wafer
JPS57159015A (en) * 1981-03-26 1982-10-01 Nec Corp Film growing device
JPS5821025A (ja) * 1981-07-31 1983-02-07 Ogura Clutch Co Ltd 逆作動連結装置
JPS58118119A (ja) * 1982-01-07 1983-07-14 Nec Corp 反応性イオンプレ−テイング装置
JPS58138334U (ja) * 1982-03-12 1983-09-17 富士通株式会社 ウエハ自動給材機構
JPS5938377A (ja) * 1982-08-26 1984-03-02 Canon Inc プラズマｃｖｄ装置
JPS60193323A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体気相成長装置
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS6250970A (ja) * 1985-08-28 1987-03-05 林　器良 多相カ−ド読み取り方法及びその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0888193A (ja) * 1995-08-11 1996-04-02 Furendotetsuku Kenkyusho:Kk 半導体デバイスの製造装置
JPH09186096A (ja) * 1997-02-06 1997-07-15 Hitachi Ltd 処理方法

Also Published As

Publication number Publication date
JPH0539624Y2 (ko) 1993-10-07

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