JPS63195722U - - Google Patents
Info
- Publication number
- JPS63195722U JPS63195722U JP8730587U JP8730587U JPS63195722U JP S63195722 U JPS63195722 U JP S63195722U JP 8730587 U JP8730587 U JP 8730587U JP 8730587 U JP8730587 U JP 8730587U JP S63195722 U JPS63195722 U JP S63195722U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- exhaust pipe
- support member
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8730587U JPS63195722U (ko) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8730587U JPS63195722U (ko) | 1987-06-05 | 1987-06-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63195722U true JPS63195722U (ko) | 1988-12-16 |
Family
ID=30944388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8730587U Pending JPS63195722U (ko) | 1987-06-05 | 1987-06-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63195722U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11233505A (ja) * | 1998-02-13 | 1999-08-27 | Tokyo Electron Ltd | 排気装置 |
-
1987
- 1987-06-05 JP JP8730587U patent/JPS63195722U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11233505A (ja) * | 1998-02-13 | 1999-08-27 | Tokyo Electron Ltd | 排気装置 |