JPS508782A - - Google Patents
Info
- Publication number
- JPS508782A JPS508782A JP5998773A JP5998773A JPS508782A JP S508782 A JPS508782 A JP S508782A JP 5998773 A JP5998773 A JP 5998773A JP 5998773 A JP5998773 A JP 5998773A JP S508782 A JPS508782 A JP S508782A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5998773A JPS535869B2 (ko) | 1973-05-28 | 1973-05-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5998773A JPS535869B2 (ko) | 1973-05-28 | 1973-05-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS508782A true JPS508782A (ko) | 1975-01-29 |
JPS535869B2 JPS535869B2 (ko) | 1978-03-02 |
Family
ID=13129015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5998773A Expired JPS535869B2 (ko) | 1973-05-28 | 1973-05-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS535869B2 (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51140888A (en) * | 1975-05-30 | 1976-12-04 | Hitachi Ltd | A vapor phase growth apparatus |
JPS61121734U (ko) * | 1985-01-18 | 1986-07-31 | ||
JPS63232422A (ja) * | 1987-03-20 | 1988-09-28 | Hitachi Ltd | 半導体ウエハの熱処理装置 |
-
1973
- 1973-05-28 JP JP5998773A patent/JPS535869B2/ja not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51140888A (en) * | 1975-05-30 | 1976-12-04 | Hitachi Ltd | A vapor phase growth apparatus |
JPS61121734U (ko) * | 1985-01-18 | 1986-07-31 | ||
JPH0539624Y2 (ko) * | 1985-01-18 | 1993-10-07 | ||
JPS63232422A (ja) * | 1987-03-20 | 1988-09-28 | Hitachi Ltd | 半導体ウエハの熱処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS535869B2 (ko) | 1978-03-02 |