JPS61117064A - 両面ポリシング装置 - Google Patents

両面ポリシング装置

Info

Publication number
JPS61117064A
JPS61117064A JP59240225A JP24022584A JPS61117064A JP S61117064 A JPS61117064 A JP S61117064A JP 59240225 A JP59240225 A JP 59240225A JP 24022584 A JP24022584 A JP 24022584A JP S61117064 A JPS61117064 A JP S61117064A
Authority
JP
Japan
Prior art keywords
workpiece
polishing
surface plate
polishing cloth
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59240225A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232110B2 (enrdf_load_stackoverflow
Inventor
Masaharu Kinoshita
正治 木下
Hideo Kawakami
川上　英雄
Shinichi Tazawa
田澤　進一
Masami Endo
正美 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP59240225A priority Critical patent/JPS61117064A/ja
Publication of JPS61117064A publication Critical patent/JPS61117064A/ja
Publication of JPH0232110B2 publication Critical patent/JPH0232110B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59240225A 1984-11-14 1984-11-14 両面ポリシング装置 Granted JPS61117064A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59240225A JPS61117064A (ja) 1984-11-14 1984-11-14 両面ポリシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59240225A JPS61117064A (ja) 1984-11-14 1984-11-14 両面ポリシング装置

Publications (2)

Publication Number Publication Date
JPS61117064A true JPS61117064A (ja) 1986-06-04
JPH0232110B2 JPH0232110B2 (enrdf_load_stackoverflow) 1990-07-18

Family

ID=17056307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59240225A Granted JPS61117064A (ja) 1984-11-14 1984-11-14 両面ポリシング装置

Country Status (1)

Country Link
JP (1) JPS61117064A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117559A (ja) * 1989-09-28 1991-05-20 Shin Etsu Chem Co Ltd 高平坦度基板の製造方法および研摩機
US5888126A (en) * 1995-01-25 1999-03-30 Ebara Corporation Polishing apparatus including turntable with polishing surface of different heights
JP2006159353A (ja) * 2004-12-08 2006-06-22 Shin Etsu Chem Co Ltd 研磨方法
USRE39262E1 (en) * 1995-01-25 2006-09-05 Ebara Corporation Polishing apparatus including turntable with polishing surface of different heights
CN110281105A (zh) * 2019-07-24 2019-09-27 蓝思科技股份有限公司 一种磨皮抛光设备和磨皮抛光棒

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5450946B2 (ja) * 2007-09-27 2014-03-26 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体ウェハの両面研磨方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5374792U (enrdf_load_stackoverflow) * 1976-11-25 1978-06-22
JPS5420494A (en) * 1977-07-15 1979-02-15 Nippon Telegr & Teleph Corp <Ntt> Polisher for surface processing
JPS5754071A (en) * 1980-09-09 1982-03-31 Matsushita Electric Ind Co Ltd Dluble surface polishing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5374792U (enrdf_load_stackoverflow) * 1976-11-25 1978-06-22
JPS5420494A (en) * 1977-07-15 1979-02-15 Nippon Telegr & Teleph Corp <Ntt> Polisher for surface processing
JPS5754071A (en) * 1980-09-09 1982-03-31 Matsushita Electric Ind Co Ltd Dluble surface polishing apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117559A (ja) * 1989-09-28 1991-05-20 Shin Etsu Chem Co Ltd 高平坦度基板の製造方法および研摩機
US5888126A (en) * 1995-01-25 1999-03-30 Ebara Corporation Polishing apparatus including turntable with polishing surface of different heights
US6102786A (en) * 1995-01-25 2000-08-15 Ebara Corporation Polishing apparatus including turntable with polishing surface of different heights
USRE39262E1 (en) * 1995-01-25 2006-09-05 Ebara Corporation Polishing apparatus including turntable with polishing surface of different heights
JP2006159353A (ja) * 2004-12-08 2006-06-22 Shin Etsu Chem Co Ltd 研磨方法
CN110281105A (zh) * 2019-07-24 2019-09-27 蓝思科技股份有限公司 一种磨皮抛光设备和磨皮抛光棒

Also Published As

Publication number Publication date
JPH0232110B2 (enrdf_load_stackoverflow) 1990-07-18

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