JPS61113209A - サ−ミスタ用酸化物半導体の製造方法 - Google Patents

サ−ミスタ用酸化物半導体の製造方法

Info

Publication number
JPS61113209A
JPS61113209A JP59235714A JP23571484A JPS61113209A JP S61113209 A JPS61113209 A JP S61113209A JP 59235714 A JP59235714 A JP 59235714A JP 23571484 A JP23571484 A JP 23571484A JP S61113209 A JPS61113209 A JP S61113209A
Authority
JP
Japan
Prior art keywords
thermistor
oxide semiconductor
manufacturing
oxide
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59235714A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0578922B2 (enrdf_load_stackoverflow
Inventor
畑　拓興
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59235714A priority Critical patent/JPS61113209A/ja
Publication of JPS61113209A publication Critical patent/JPS61113209A/ja
Publication of JPH0578922B2 publication Critical patent/JPH0578922B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP59235714A 1984-11-08 1984-11-08 サ−ミスタ用酸化物半導体の製造方法 Granted JPS61113209A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59235714A JPS61113209A (ja) 1984-11-08 1984-11-08 サ−ミスタ用酸化物半導体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59235714A JPS61113209A (ja) 1984-11-08 1984-11-08 サ−ミスタ用酸化物半導体の製造方法

Publications (2)

Publication Number Publication Date
JPS61113209A true JPS61113209A (ja) 1986-05-31
JPH0578922B2 JPH0578922B2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=16990139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59235714A Granted JPS61113209A (ja) 1984-11-08 1984-11-08 サ−ミスタ用酸化物半導体の製造方法

Country Status (1)

Country Link
JP (1) JPS61113209A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0578922B2 (enrdf_load_stackoverflow) 1993-10-29

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