JPS6110939Y2 - - Google Patents

Info

Publication number
JPS6110939Y2
JPS6110939Y2 JP1981010438U JP1043881U JPS6110939Y2 JP S6110939 Y2 JPS6110939 Y2 JP S6110939Y2 JP 1981010438 U JP1981010438 U JP 1981010438U JP 1043881 U JP1043881 U JP 1043881U JP S6110939 Y2 JPS6110939 Y2 JP S6110939Y2
Authority
JP
Japan
Prior art keywords
suction
suction head
pump chamber
elevating member
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981010438U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57126992U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981010438U priority Critical patent/JPS6110939Y2/ja
Publication of JPS57126992U publication Critical patent/JPS57126992U/ja
Application granted granted Critical
Publication of JPS6110939Y2 publication Critical patent/JPS6110939Y2/ja
Expired legal-status Critical Current

Links

JP1981010438U 1981-01-27 1981-01-27 Expired JPS6110939Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981010438U JPS6110939Y2 (enrdf_load_stackoverflow) 1981-01-27 1981-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981010438U JPS6110939Y2 (enrdf_load_stackoverflow) 1981-01-27 1981-01-27

Publications (2)

Publication Number Publication Date
JPS57126992U JPS57126992U (enrdf_load_stackoverflow) 1982-08-07
JPS6110939Y2 true JPS6110939Y2 (enrdf_load_stackoverflow) 1986-04-07

Family

ID=29808600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981010438U Expired JPS6110939Y2 (enrdf_load_stackoverflow) 1981-01-27 1981-01-27

Country Status (1)

Country Link
JP (1) JPS6110939Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59193690U (ja) * 1983-06-13 1984-12-22 株式会社日本触媒 真空吸着パツド
JP2003100848A (ja) * 2001-09-25 2003-04-04 Applied Materials Inc 基板保持装置
JP5384078B2 (ja) * 2008-10-22 2014-01-08 エナックス株式会社 連続セパレータ及びシート状電極の積層装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51101474U (enrdf_load_stackoverflow) * 1975-02-10 1976-08-14

Also Published As

Publication number Publication date
JPS57126992U (enrdf_load_stackoverflow) 1982-08-07

Similar Documents

Publication Publication Date Title
JP2005138276A (ja) 吸着支持装置
JPS6110939Y2 (enrdf_load_stackoverflow)
JP2010115663A (ja) 基材の接合方法及び基材の接合装置
JPH07178691A (ja) 吸着パッド
JP2004058202A (ja) 吸着装置
CN114321140A (zh) 真空负压吸附装置及多足机器人
JPH0662225B2 (ja) 真空吸着装置
KR20240087604A (ko) 흡착 패드
JP4217190B2 (ja) 吸着装置
JP3132496B2 (ja) ダイボンディング装置
JPS62215116A (ja) 多カツプ式負圧吸着装置
JPH0413561B2 (enrdf_load_stackoverflow)
JP3352590B2 (ja) 粉末成形機のホッパー
JPS6344650B2 (enrdf_load_stackoverflow)
JPS5852071Y2 (ja) 真空吸着装置
JPH06270087A (ja) 真空吸着装置
JPH0516174U (ja) 吸盤装置
JPH0731868Y2 (ja) 真空パット
JPH0594549U (ja) 空気ばね装置
CN104139981B (zh) 用于保持药物容器的真空抽吸器和具有多个真空抽吸器的设备
JP2002187619A (ja) 電気レス自動ピッキング装置
CN216548477U (zh) 一种吸附装置
JPH08188277A (ja) 真空吸着装置
JPH04258332A (ja) 吸着装置
JPH0343032B2 (enrdf_load_stackoverflow)