JPS61104960U - - Google Patents

Info

Publication number
JPS61104960U
JPS61104960U JP18993584U JP18993584U JPS61104960U JP S61104960 U JPS61104960 U JP S61104960U JP 18993584 U JP18993584 U JP 18993584U JP 18993584 U JP18993584 U JP 18993584U JP S61104960 U JPS61104960 U JP S61104960U
Authority
JP
Japan
Prior art keywords
objective lens
potential
magnetic pole
sample
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18993584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319166Y2 (US06521211-20030218-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18993584U priority Critical patent/JPH0319166Y2/ja
Publication of JPS61104960U publication Critical patent/JPS61104960U/ja
Application granted granted Critical
Publication of JPH0319166Y2 publication Critical patent/JPH0319166Y2/ja
Expired legal-status Critical Current

Links

JP18993584U 1984-12-14 1984-12-14 Expired JPH0319166Y2 (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18993584U JPH0319166Y2 (US06521211-20030218-C00004.png) 1984-12-14 1984-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18993584U JPH0319166Y2 (US06521211-20030218-C00004.png) 1984-12-14 1984-12-14

Publications (2)

Publication Number Publication Date
JPS61104960U true JPS61104960U (US06521211-20030218-C00004.png) 1986-07-03
JPH0319166Y2 JPH0319166Y2 (US06521211-20030218-C00004.png) 1991-04-23

Family

ID=30747383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18993584U Expired JPH0319166Y2 (US06521211-20030218-C00004.png) 1984-12-14 1984-12-14

Country Status (1)

Country Link
JP (1) JPH0319166Y2 (US06521211-20030218-C00004.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093161A (ja) * 1995-10-19 2006-04-06 Hitachi Ltd 走査形電子顕微鏡
JP2007005327A (ja) * 1995-10-19 2007-01-11 Hitachi Ltd 走査形電子顕微鏡
JP2007250560A (ja) * 1995-10-19 2007-09-27 Hitachi Ltd 走査形電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093161A (ja) * 1995-10-19 2006-04-06 Hitachi Ltd 走査形電子顕微鏡
JP2007005327A (ja) * 1995-10-19 2007-01-11 Hitachi Ltd 走査形電子顕微鏡
JP2007250560A (ja) * 1995-10-19 2007-09-27 Hitachi Ltd 走査形電子顕微鏡

Also Published As

Publication number Publication date
JPH0319166Y2 (US06521211-20030218-C00004.png) 1991-04-23

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