JPS611035A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS611035A
JPS611035A JP12408084A JP12408084A JPS611035A JP S611035 A JPS611035 A JP S611035A JP 12408084 A JP12408084 A JP 12408084A JP 12408084 A JP12408084 A JP 12408084A JP S611035 A JPS611035 A JP S611035A
Authority
JP
Japan
Prior art keywords
semiconductor device
insulating film
manufacturing
electrode layer
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12408084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317218B2 (enExample
Inventor
Nobuhisa Maki
牧　信久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12408084A priority Critical patent/JPS611035A/ja
Publication of JPS611035A publication Critical patent/JPS611035A/ja
Publication of JPH0317218B2 publication Critical patent/JPH0317218B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12408084A 1984-06-13 1984-06-13 半導体装置の製造方法 Granted JPS611035A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12408084A JPS611035A (ja) 1984-06-13 1984-06-13 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12408084A JPS611035A (ja) 1984-06-13 1984-06-13 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS611035A true JPS611035A (ja) 1986-01-07
JPH0317218B2 JPH0317218B2 (enExample) 1991-03-07

Family

ID=14876428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12408084A Granted JPS611035A (ja) 1984-06-13 1984-06-13 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS611035A (enExample)

Also Published As

Publication number Publication date
JPH0317218B2 (enExample) 1991-03-07

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