JPS6110255A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6110255A
JPS6110255A JP9360485A JP9360485A JPS6110255A JP S6110255 A JPS6110255 A JP S6110255A JP 9360485 A JP9360485 A JP 9360485A JP 9360485 A JP9360485 A JP 9360485A JP S6110255 A JPS6110255 A JP S6110255A
Authority
JP
Japan
Prior art keywords
film
insulation film
electrode
insulating film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9360485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216013B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Masuhara
増原　利明
Hideo Sunami
英夫 角南
Yoshiaki Kamigaki
良昭 神垣
Tetsukazu Hashimoto
哲一 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9360485A priority Critical patent/JPS6110255A/ja
Publication of JPS6110255A publication Critical patent/JPS6110255A/ja
Publication of JPS6216013B2 publication Critical patent/JPS6216013B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9360485A 1985-05-02 1985-05-02 半導体装置の製造方法 Granted JPS6110255A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9360485A JPS6110255A (ja) 1985-05-02 1985-05-02 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9360485A JPS6110255A (ja) 1985-05-02 1985-05-02 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11471976A Division JPS5340291A (en) 1976-09-27 1976-09-27 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6110255A true JPS6110255A (ja) 1986-01-17
JPS6216013B2 JPS6216013B2 (enrdf_load_stackoverflow) 1987-04-10

Family

ID=14086929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9360485A Granted JPS6110255A (ja) 1985-05-02 1985-05-02 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6110255A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932635A (enrdf_load_stackoverflow) * 1972-07-21 1974-03-25
JPS5019363A (enrdf_load_stackoverflow) * 1973-06-21 1975-02-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932635A (enrdf_load_stackoverflow) * 1972-07-21 1974-03-25
JPS5019363A (enrdf_load_stackoverflow) * 1973-06-21 1975-02-28

Also Published As

Publication number Publication date
JPS6216013B2 (enrdf_load_stackoverflow) 1987-04-10

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