JPS61101956U - - Google Patents

Info

Publication number
JPS61101956U
JPS61101956U JP18764084U JP18764084U JPS61101956U JP S61101956 U JPS61101956 U JP S61101956U JP 18764084 U JP18764084 U JP 18764084U JP 18764084 U JP18764084 U JP 18764084U JP S61101956 U JPS61101956 U JP S61101956U
Authority
JP
Japan
Prior art keywords
objective lens
sample
auxiliary electrode
electron beam
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18764084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236208Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984187640U priority Critical patent/JPH0236208Y2/ja
Publication of JPS61101956U publication Critical patent/JPS61101956U/ja
Application granted granted Critical
Publication of JPH0236208Y2 publication Critical patent/JPH0236208Y2/ja
Expired legal-status Critical Current

Links

JP1984187640U 1984-12-11 1984-12-11 Expired JPH0236208Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984187640U JPH0236208Y2 (enrdf_load_stackoverflow) 1984-12-11 1984-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984187640U JPH0236208Y2 (enrdf_load_stackoverflow) 1984-12-11 1984-12-11

Publications (2)

Publication Number Publication Date
JPS61101956U true JPS61101956U (enrdf_load_stackoverflow) 1986-06-28
JPH0236208Y2 JPH0236208Y2 (enrdf_load_stackoverflow) 1990-10-02

Family

ID=30745102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984187640U Expired JPH0236208Y2 (enrdf_load_stackoverflow) 1984-12-11 1984-12-11

Country Status (1)

Country Link
JP (1) JPH0236208Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141545A (enrdf_load_stackoverflow) * 1974-08-07 1976-04-07 Rank Organisation Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141545A (enrdf_load_stackoverflow) * 1974-08-07 1976-04-07 Rank Organisation Ltd

Also Published As

Publication number Publication date
JPH0236208Y2 (enrdf_load_stackoverflow) 1990-10-02

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